Process for semiconductor circuit
View Patent ↗A semiconductor process for forming specific pattern features comprising the steps of forming a target layer, a hard mask layer and a plurality of equally spaced-apart core bodies on a substrate, forming spacers on sidewalls of the core bodies, removing the core bodies so that the spacers are spaced-apart on the hard mask layer, using spacers as a mask to pattern the hard mask layer, removing the hard mask bodies outside of a predetermined region, forming photoresists on several outermost hard mask bodies of the predetermined region, and using the photoresists and remaining hard mask bodies as a mask to pattern the target layer.
1. A semiconductor process for forming special pattern features, comprising:
sequentially forming a target layer, a hard mask layer and a plurality of equally spaced-apart core bodies on a substrate having two first predetermined regions and a second predetermined region, wherein said core bodies have the same width and said two first predetermined regions are respectively located at both sides of said second predetermined region;
forming spacers on sidewalls of said core bodies, wherein adjacent spacers are spaced-apart by a recess;
forming first photoresists respectively on said two first predetermined regions encompassing several said core bodies;
removing said core bodies not covered by said first photoresists so that said spacers in said second predetermined region are spaced-apart on said hard mask layer;
using said spacers and said remained core bodies as a mask to pattern said hard mask layer into a plurality of spaced-apart large and small hard mask bodies, wherein said hard mask bodies in said two first predetermined regions are larger than said hard mask bodies in said second predetermined region;
forming second photoresists respectively on said two first predetermined regions covering said hard mask bodies; and
using said second photoresists and said hard mask bodies as a mask to pattern said target layer.
2. The semiconductor process for forming special pattern features according to claim 1 , after patterning said hard mask layer into a plurality of spaced-apart hard mask bodies, further comprising a step of removing said hard mask bodies outside of said two first predetermined regions and said second predetermined region.
3. The semiconductor process for forming special pattern features according to claim 1 , wherein said small hard mask bodies in said second predetermined regions are word line patterns.
4. The semiconductor process for forming special pattern features according to claim 3 , wherein the number of said small hard mask bodies in said second predetermined regions is 2 n , wherein n is a positive integer larger than 5.
5. The semiconductor process for forming special pattern features according to claim 1 , wherein said second photoresists and said hard mask bodies covered by said second photoresists constitute select gate patterns.
6. The semiconductor process for forming special pattern features according to claim 1 , wherein the step of forming said spacers on the sidewalls of said core bodies further comprises conformally forming a spacer material layer on said hard mask layers and said core bodies, so that a plurality of recesses are formed on said spacer material layer, and each said recess is formed between two adjacent said core bodies.
7. The semiconductor process for forming special pattern features according to claim 6 , wherein the step of forming said spacers on the sidewalls of said core bodies further comprises removing parts of said spacer material layer to expose top surfaces of said core bodies and said hard mask layer under said recesses.
8. The semiconductor process for forming special pattern features according to claim 1 , wherein said semiconductor process is a positive self-aligned double patterning process.