Method of manufacturing display unit
View Patent ↗A method of manufacturing a display unit includes: forming, on a substrate, a thin-film transistor having an oxide semiconductor layer; and forming, above the thin-film transistor, a display region that includes a plurality of display elements. The oxide semiconductor layer is formed using a sputtering method in which a target and the substrate are opposed to each other. The target is made of an oxide semiconductor and includes a plurality of divided portions that are jointed in a planar form. A spacing interval between two joints that are formed by the plurality of divided portions and are side-by-side with one another of the target is equal to or less than a width of a luminance distribution arising in the display region in a direction substantially orthogonal to the joints.
1. A method of manufacturing a display unit, the method comprising:
forming, on a substrate, a thin-film transistor having an oxide semiconductor layer; and
forming, above the thin-film transistor, a display region that includes a plurality of display elements,
wherein,
the oxide semiconductor layer is formed using a sputtering method in which a target and the substrate are opposed to each other, the target being made of an oxide semiconductor and including a plurality of divided portions that are jointed in a planar form, and
a spacing interval between two joints that are formed by the plurality of divided portions and are side-by-side with one another of the target is equal to or less than a width of a luminance distribution arising in the display region in a direction substantially orthogonal to the joints.
2. The method of manufacturing the display unit according to claim 1 , wherein:
the oxide semiconductor layer is formed by oscillating or advancing the substrate in opposition to the target, and
the spacing interval between the two joints that are side-by-side with one another of the target is equal to or less than the width of the luminance distribution arising in the display region in a direction substantially orthogonal to a direction in which the substrate is displaced in the oscillating or in the advancing.
3. The method of manufacturing the display unit according to claim 1 , wherein the spacing interval between the two joints that are side-by-side with one another of the target is about 40 mm or less.
4. The method of manufacturing the display unit according to claim 1 , wherein the display element is an organic light-emitting element driven by the thin-film transistor.
5. The method of manufacturing the display unit according to claim 1 , wherein the display element is a liquid crystal display element driven by the thin-film transistor.
6. The method of manufacturing the display unit according to claim 1 , wherein the display element is an electrophoretic display element driven by the thin-film transistor.