Method for fabricating a MOS transistor with reduced channel length variation
View Patent ↗According to an exemplary embodiment, a method for fabricating a MOS transistor, such as an LDMOS transistor, includes forming a self-aligned lightly doped region in a first well underlying a first sidewall of a gate. The method further includes forming a self-aligned extension region under a second sidewall of the gate, where the self-aligned extension region extends into the first well from a second well. The method further includes forming a drain region spaced apart from the second sidewall of the gate. The method further includes forming a source region in the self-aligned lightly doped region and the first well. The self-aligned lightly doped region and the self-aligned extension region define a channel length of the MOS transistor, such as an LDMOS transistor.
1. A method for fabricating a MOS transistor, said method comprising:
forming a self-aligned lightly doped region in a first well underlying a first sidewall of a gate;
forming a self-aligned extension region under a second sidewall of said gate, said self-aligned extension region extending into said first well from a second well extending under said gate, said self-aligned extension region and said second well having a same conductivity type;
forming a drain region spaced apart from said second sidewall of said gate.
2. The method of claim 1 , wherein said self-aligned lightly doped region and said self-aligned extension region define a channel length of said MOS transistor.
3. The method of claim 1 further comprising forming a source region in said self-aligned lightly doped region and said first well.
4. The method of claim 1 , wherein said forming said self-aligned extension region comprises utilizing a halo implant self-aligned to said gate.
5. The method of claim 1 , wherein said drain region is separated from said second sidewall of said gate by an isolation region.
6. The method of claim 5 , wherein said self-aligned extension region extends under said gate a greater distance from said isolation region than said second well.
7. The method of claim 1 , wherein said second well and said self-aligned extension region have an opposite conductivity type than said first well.
8. The method of claim 1 further comprising forming a halo implanted region adjacent to said self-aligned lightly doped region prior to said forming said self-aligned extension region.
9. The method of claim 1 further comprising forming an inner spacer adjacent said first and second sidewalls of said gate prior to said forming said self-aligned extension region.
10. The method of claim 1 , wherein said MOS transistor is an LDMOS transistor.
11. A method for fabricating a MOS transistor, said method comprising:
forming a lightly doped region in a first well underlying a first sidewall of a gate;
forming an extension region under a second sidewall of said gate, said extension region extending into said first well from a second well extending under said gate, said extension region and said second well having a same conductivity type;
forming a drain region spaced apart from said second sidewall of said gate.
12. The method of claim 11 wherein said lightly doped region and said extension region define a channel length of said MOS transistor.
13. The method of claim 11 further comprising forming a source region in said lightly doped region and said first well.
14. The method of claim 11 wherein said forming said extension region comprises utilizing a halo implant self-aligned to said gate.
15. The method of claim 11 wherein said drain region is separated from said second sidewall of said gate by an isolation region.
16. The method of claim 15 wherein said extension region extends under said gate a greater distance from said isolation region than said second well.
17. The method of claim 11 wherein said second well and said extension region have an opposite conductivity type relative to said first well.
18. The method of claim 11 further comprising forming a halo implanted region adjacent to said lightly doped region prior to said forming said extension region.
19. The method of claim 11 further comprising forming an inner spacer adjacent said first and second sidewalk of said gate prior to said forming said extension region.
20. The method of claim 11 wherein said MOS transistor is an LDMOS transistor.