Metal barrier-doped metal contact layer
View Patent ↗A photovoltaic device can include an intrinsic metal layer adjacent to a semiconductor absorber layer; and a doped metal contact layer adjacent to the intrinsic metal layer, where the doped metal contact layer includes a metal base material and a dopant.
1. A method for manufacturing a photovoltaic device, the method comprising:
depositing an intrinsic metal layer on a semiconductor absorber layer; sputtering a doped metal contact layer on the intrinsic metal layer, the doped metal contact layer comprising a metal base material and a dopant material, wherein the metal base material is molybdenum, and wherein the dopant material is copper and the doped metal contact layer comprises a copper concentration of about 0.1% to about 10%; and
forming a concentration gradient of the dopant material in the intrinsic metal layer by causing diffusion of at least some of the dopant material from the doped metal contact layer.
2. The method of claim 1 , wherein depositing the intrinsic metal layer comprises sputtering a molybdenum nitride.
3. The method of claim 1 , wherein depositing the intrinsic metal layer comprises depositing one selected from the group consisting of a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, and platinum.
4. The method of claim 1 , wherein the metal base material is selected from the group consisting of molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, and platinum; and
wherein the dopant material is selected from the group consisting of copper, antimony, potassium, sodium, cesium, silver, gold, phosphorous, arsenic, and bismuth.
5. The method of claim 1 , wherein sputtering the doped metal contact layer comprises sputtering a metal base material that comprises the same metal as the intrinsic metal layer.
6. A method for manufacturing a photovoltaic device, the method comprising:
depositing an intrinsic metal layer on a semiconductor absorber layer;
sputtering a doped metal contact layer on the intrinsic metal layer, the doped metal contact layer comprising a metal base material and a dopant material, wherein the metal base material is molybdenum and wherein the dopant material is copper and the doped metal contact layer comprises a copper concentration of about 0.1% to about 10%.
7. The method of claim 6 , wherein depositing the intrinsic metal layer comprises sputtering a molybdenum nitride.
8. The method of claim 6 , wherein depositing the intrinsic metal layer comprises depositing a metal selected from the group consisting of a molybdenum, aluminum, chromium, iron, nickel, titanium, vanadium, manganese, cobalt, zinc, ruthenium, tungsten, silver, gold, and platinum.
9. The method of claim 6 , wherein depositing the doped metal contact layer comprises sputtering a metal base material that comprises the same metal as the intrinsic metal layer.