Array substrate and manufacturing method thereof
A manufacturing method of an array substrate includes the following steps. A gate electrode and a gate insulator layer are successively formed on a substrate. A semiconductor layer, an etching stop layer, a hard mask layer, and a second patterned photoresist are successively formed on the gate insulator layer. The second patterned photoresist is employed for performing an over etching process to the hard mask layer to form a patterned hard mask layer. The second patterned photoresist is employed for performing a first etching process to the etching stop layer. The second patterned photoresist is then employed for performing a second etching process to the semiconductor layer to form a patterned semiconductor layer. The etching stop layer uncovered by the patterned hard mask layer is then removed for forming a patterned etching stop layer.
1. A manufacturing method of an array substrate, comprising:
providing a substrate;
performing a first photolithography process to form a gate electrode on the substrate;
forming a gate insulating layer to cover the substrate and the gate electrode;
performing a second photolithography process, wherein the second photolithography process comprises:
forming a semiconductor layer, an etching stop layer and a hard mask layer on the gate insulating layer successively, and forming a second patterned photoresist on the hard mask layer;
employing the second patterned photoresist for performing an over etching process to the hard mask layer to form a patterned hard mask layer on the etching stop layer;
employing the second patterned photoresist for performing a first etching process to the etching stop layer;
employing the second patterned photoresist for performing a second etching process to the semiconductor layer to form a patterned semiconductor layer on the gate insulating layer; and
removing the etching stop layer uncovered by the patterned hard mask layer for forming a patterned etching stop layer on the patterned semiconductor layer; and
performing a third photolithography process to form a source electrode and a drain electrode on the patterned etching stop layer and the patterned semiconductor layer.
2. The manufacturing method of the array substrate according to claim 1 , wherein the second photolithography process further comprises removing the gate insulating layer uncovered by the patterned semiconductor layer.
3. The manufacturing method of the array substrate according to claim 2 , further comprising forming a pad electrode by the first photolithography process and partially exposing the pad electrode by the second photolithography process.
4. The manufacturing method of the array substrate according to claim 1 , wherein the third photolithography process further comprises:
forming a second conductive layer to cover the patterned hard mask layer and the patterned semiconductor layer;
forming a transparent conductive layer on the second conductive layer and forming a third patterned photoresist on the transparent conductive layer; and
removing the transparent conductive layer and the second conductive layer uncovered by the third patterned photoresist for forming a pixel electrode, the source electrode and the drain electrode.
5. The manufacturing method of the array substrate according to claim 4 , further comprising removing the patterned hard mask layer before forming the second conducting layer.
6. The manufacturing method of the array substrate according to claim 4 , further comprising performing a fourth photolithography process to form an isolation layer on the source electrode and the drain electrode, wherein the isolation layer has a pixel opening and the pixel opening at least partially exposes the pixel electrode.
7. The manufacturing method of the array substrate according to claim 6 , wherein the fourth photolithography process further comprises forming a protective layer to at least partially cover the source electrode, the drain electrode and the patterned etching stop layer before forming the isolation layer.
8. The manufacturing method of the array substrate according to claim 1 , wherein the third photolithography process comprises:
forming a second conductive layer to cover the patterned hard mask layer and the patterned semiconductor layer;
forming a transparent conductive layer on the second conductive layer and forming an isolation layer on the transparent conductive layer; and
removing the transparent conductive layer and the second conductive layer uncovered by the isolation layer for forming a pixel electrode, the source electrode and the drain electrode.
9. The manufacturing method of the array substrate according to claim 8 , wherein the isolation layer has a first thickness region and a second thickness region, and a thickness of the isolation layer in the second thickness region is thinner than a thickness of the isolation layer in the first thickness region.
10. The manufacturing method of the array substrate according to claim 9 , further comprising removing the isolation layer in the second thickness region for forming a pixel opening, wherein the pixel opening partially exposes the pixel electrode.
11. The manufacturing method of the array substrate according to claim 1 , wherein the first photolithography process comprises:
forming a transparent conductive and a first conductive layer successively on the substrate and forming a first patterned photoresist on the first conductive layer; and
removing the first conductive layer and the transparent conductive layer uncovered by the first patterned photoresist for forming the gate electrode and a pixel electrode.
12. The manufacturing method of the array substrate according to claim 11 , wherein the third photolithography process comprises:
forming a second conductive layer to cover the patterned hard mask layer, the patterned semiconductor layer and a part of the first conductive layer;
forming a third patterned photoresist on the second conductive layer;
removing the second conductive layer uncovered by the third patterned photoresist for forming the source electrode and the drain electrode; and
removing at least a part of the first conductive layer uncovered by the third patterned photoresist to at least partially expose the pixel electrode.
13. The manufacturing method of the array substrate according to claim 11 , further comprising performing a fourth photolithography process to form an isolation layer on the source electrode and the drain electrode, wherein the isolation layer has a pixel opening and the pixel opening at least partially exposes the pixel electrode.
14. The manufacturing method of the array substrate according to claim 13 , wherein the fourth photolithography process further comprises forming a protective layer to at least partially cover the source electrode, the drain electrode and the patterned etching stop layer before forming the isolation layer.
15. The manufacturing method of the array substrate according to claim 11 , wherein the third photolithography process further comprises:
forming a second conductive layer to cover the patterned hard mask layer, the patterned semiconductor layer and a part of the first conductive layer;
forming an isolation layer on the second conductive layer;
removing the second conductive layer uncovered by the isolation layer for forming the source electrode and the drain electrode; and
removing at least a part of the first conductive layer uncovered by the isolation layer to partially expose the pixel electrode.
16. The manufacturing method of the array substrate according to claim 1 , wherein the semiconductor layer comprises an oxide semiconductor material, an amorphous silicon semiconductor material or a poly silicon semiconductor material.
17. The manufacturing method of the array substrate according to claim 1 , wherein the hard mask layer comprises a metallic material.