Display device, method of manufacturing the same, and electronic unit
View Patent ↗A display device includes: a thin film transistor; and a wiring layer; the thin film transistor including a control electrode, a semiconductor layer facing the control electrode, a first electrode made of a light transmissive material and electrically connected to the semiconductor layer, and a second electrode including a metal film having resistance lower than that of the light transmissive material, the second electrode being electrically connected to each of the semiconductor layer and the wiring layer, wherein a difference in ionization tendency between a material configuring the metal film and a conductive material configuring a part or whole of the wiring layer is smaller than a difference in ionization tendency between the light transmissive material and the conductive material.
1. A display device comprising:
a thin film transistor; and
a wiring layer;
the thin film transistor including
a control electrode,
a semiconductor layer facing the control electrode,
a first electrode made only of a light transmissive material and electrically connected to the semiconductor layer, and
a second electrode including a metal film and the light transmissive material, the metal film having resistance lower than that of the light transmissive material, the second electrode being electrically connected to each of the semiconductor layer and the wiring layer, wherein
a difference in ionization tendency between a material configuring the metal film and a conductive material configuring a part or whole of the wiring layer is smaller than a difference in ionization tendency between the light transmissive material and the conductive material.
2. The display device according to claim 1 , wherein the conductive material and the material configuring the metal film are the same material.
3. The display device according to claim 1 , wherein
the metal film of the second electrode is laminated on a film made of the light transmissive material, and
the wiring layer includes a film made of the light transmissive material, and a film made of the conductive material laminated on the film made of the light transmissive material.
4. The display device according to claim 1 , wherein
the light transmissive material is ITO (indium-tin-oxide), and
the metal film is an aluminum (Al) film.
5. The display device according to claim 1 , wherein the semiconductor layer is configured of an oxide semiconductor.
6. A method of manufacturing a display device, the method including forming a thin film transistor and a wiring layer,
the forming of a thin film transistor comprising:
providing a control electrode and a semiconductor layer facing the control electrode;
providing a first electrode made only of a light transmissive material and electrically connected to the semiconductor layer; and
forming a second electrode by forming a metal film and the light transmissive material, the metal film having resistance lower than that of the light transmissive material, the metal film being electrically connected to the wiring layer and the light transmissive material being electrically connected to the semiconductor layer, and thereafter patterning the metal film, wherein
a difference in ionization tendency between a material configuring the metal film and a conductive material configuring a part or whole of the wiring layer is smaller than a difference in ionization tendency between the light transmissive material and the conductive material.
7. The method of manufacturing a display device according to claim 6 , wherein, during the forming of the second electrode, a film made of the light transmissive material and the metal film are sequentially formed in this order, and thereafter the film made of the light transmissive material and the metal film are patterned.
8. The method of manufacturing a display device according to claim 7 , wherein, during the patterning of the film made of the light transmissive material and the metal film, a first resist layer is provided on the metal film to pattern the metal film, and after the metal film is patterned, a second resist layer is formed on the first resist layer to pattern the film made of the light transmissive material.
9. An electronic unit with a display device, the display device comprising:
a thin film transistor; and
a wiring layer;
the thin film transistor including
a control electrode,
a semiconductor layer facing the control electrode,
a first electrode made only of a light transmissive material and electrically connected to the semiconductor layer, and
a second electrode including a metal film and the light transmissive material, the metal film having resistance lower than that of the light transmissive material, the second electrode being electrically connected to each of the semiconductor layer and the wiring layer, wherein
a difference in ionization tendency between a material configuring the metal film and a conductive material configuring a part or whole of the wiring layer is smaller than a difference in ionization tendency between the light transmissive material and the conductive material.
10. The display device according to claim 3 , wherein the wiring layer includes at least one of a signal line, a scan line, and a power line.
11. The display device according to claim 1 , wherein the wiring layer includes:
the light transmissive material disposed upon a substrate,
the metal film laminated upon the light transmissive layer, and
the conductive material connected to the metal film.
12. The display device according to claim 1 , wherein the first electrode includes a drain of the thin film transistor and the second electrode includes a source of the thin film transistor.
13. The display device according to claim 1 , wherein the first electrode includes a source of the thin film transistor and the second electrode includes a drain of the thin film transistor.