Generation of a frequency comb and applications thereof
View Patent ↗Apparatus for generating a microwave frequency comb (MFC) in the DC tunneling current of a scanning tunneling microscope (STM) by fast optical rectification, caused by nonlinearity of the DC current vs. voltage curve for the tunneling junction, of regularly-spaced, short pulses of optical radiation from a focused mode-locked, ultrafast laser, directed onto the tunneling junction, is described. Application of the MFC to high resolution dopant profiling in semiconductors is simulated. Application of the MFC to other measurements is described.
1. An apparatus for generating a microwave frequency comb comprising:
a scanning tunneling microscope comprising:
control electronics;
a source for generating a bias voltage; and
a tunneling junction having a chosen diameter, a DC current generated from said bias voltage, and a shunting capacitance, said tunneling junction being effective for producing optical rectification; and
a mode-locked laser having a pulsed output having a mean photon energy focused onto said tunneling junction with a chosen repetition rate; whereby pulses having a chosen spacing are superimposed on the DC current of said tunneling junction such that the microwave frequency comb is produced having a fundamental frequency and harmonic frequencies at integer multiples of the pulse repetition rate of said laser, each harmonic having a linewidth.
2. The apparatus of claim 1 , wherein said tunneling junction comprises a tip electrode and a sample electrode disposed a chosen distance therefrom.
3. The apparatus of claim 2 , wherein said tip electrode is chosen from gold, tungsten, platinum, and iridium, and mixtures thereof.
4. The apparatus of claim 2 , wherein said sample electrode is chosen from gold, tungsten, platinum, and iridium, and mixtures thereof.
5. The apparatus of claim 1 , wherein the chosen diameter of said tunneling junction is ≦1 nm, whereby the shunting capacitance is reduced to obtain improved high frequency response of the microwave frequency comb.
6. The apparatus of claim 1 , wherein said mode-locked laser is actively or passively stabilized.
7. The apparatus of claim 1 , wherein said scanning tunneling microscope further comprises a bias-T for separating said microwave frequency comb from said control electronics and said source of bias voltage, and for coupling said microwave frequency comb from said sample and said tip.
8. The apparatus of claim 1 , wherein the mean photon energy of the output of said mode-locked laser is between about 650 nm and approximately 1100 nm.
9. An apparatus for characterizing a semiconductor sample comprising:
a scanning tunneling microscope comprising: control electronics; a source for generating a DC bias voltage; a tunneling junction having a chosen diameter, a DC current generated from said DC bias voltage, and a shunting capacitance, said tunneling junction being effective for producing optical rectification, said tunneling junction comprising a tip electrode and a semiconductor sample electrode having a surface disposed a chosen distance therefrom and a band gap energy; and
a scanner for adjusting the chosen distance and for rastering said tunneling junction over the surface of said semiconductor electrode; and
a mode-locked laser having a pulsed output having a chosen mean photon energy less than the band gap energy focused onto said tunneling junction with a chosen repetition rate; whereby pulses having a chosen spacing are superimposed on the DC current of said tunneling junction such that a microwave frequency comb is produced having a fundamental frequency and harmonic frequencies at integer multiples of the pulse repetition rate of said laser; and whereby the bias voltage creates a depletion region in said semiconductor sample causing thereby a frequency-dependent attenuation of said microwave frequency comb at each tunneling junction location, from which dopant concentration of the depletion region is determined.
10. The apparatus of claim 9 , wherein said tip electrode is chosen from gold, tungsten, platinum, and iridium, and mixtures thereof.
11. The apparatus of claim 9 , wherein the chosen diameter of said tunneling junction is 1 nm, whereby the shunting capacitance is reduced to obtain improved high frequency response of the microwave frequency comb.
12. The apparatus of claim 9 , wherein said scanning tunneling microscope further comprises a bias-T for separating said microwave frequency comb from said control electronics and said source of DC bias voltage, and for coupling said microwave frequency comb from said sample and said tip.