IP Library Granted Patent US 8,872,020
Granted Patent B2
US 8,872,020 · App. 13/626,740 · Granted Oct 28, 2014

Heterojunction solar cell based on epitaxial crystalline-silicon thin film on metallurgical silicon substrate design

Inventors: Chentao Yu (Sunnyvale, CA); Jiunn Benjamin Heng (Redwood City, CA); Zheng Xu (Pleasanton, CA); Jianming Fu (Palo Alto, CA); Jianjun Liang (Fremont, CA)
Assignee: Silevo, Inc.
H01L31/0747Y02E10/547H01L31/1804H01L31/202H01L31/18
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Quick Facts
Patent No.
US 8,872,020
App. No.
13/626,740
Granted
Oct 28, 2014
Kind
B2
Abstract

One embodiment of the present invention provides a heterojunction solar cell. The solar cell includes a metallurgical-grade Si (MG-Si) substrate, a layer of heavily doped crystalline-Si situated above the MG-Si substrate, a layer of lightly doped crystalline-Si situated above the heavily doped crystalline-Si layer, a backside ohmic-contact layer situated on the backside of the MG-Si substrate, a passivation layer situated above the heavily doped crystalline-Si layer, a layer of heavily doped amorphous Si (a-Si) situated above the passivation layer, a layer of transparent-conducting-oxide (TCO) situated above the heavily doped a-Si layer, and a front ohmic-contact electrode situated above the TCO layer.

Claims (18)

1. A heterojunction solar cell, comprising:

a metallurgical-grade Si (MG-Si) substrate that has undergone a process of metal-impurity leaching;

a layer of heavily doped epitaxial mono-crystalline-Si situated above the MG-Si substrate, wherein the heavily doped epitaxial mono-crystalline-Si layer is in direct contact with the MG-Si substrate, and wherein the heavily doped epitaxial mono-crystalline-Si layer acts as a back-surface field (BSF) layer;

a layer of lightly doped epitaxial mono-crystalline-Si situated above the heavily doped epitaxial mono-crystalline-Si layer, wherein the lightly doped epitaxial mono-crystalline-Si layer acts as a base layer;

a backside ohmic-contact layer situated on the backside of the MG-Si substrate;

a passivation layer situated above the heavily doped epitaxial mono-crystalline-Si BSF layer;

a layer of heavily doped amorphous Si (a-Si) situated above the passivation layer;

a layer of transparent-conducting-oxide (TCO) situated above the heavily doped a-Si layer; and

a front ohmic-contact electrode situated above the TCO layer.

2. The heterojunction solar cell of claim 1 , wherein a doping type of the MG-Si substrate is the same as that of the heavily doped epitaxial mono-crystalline-Si BSF layer.

3. The heterojunction solar cell of claim 1 , wherein the metal-impurity leaching process is performed at a high temperature in an atmosphere of H 2 and HCl.

4. The heterojunction solar cell of claim 1 , wherein the heavily doped epitaxial mono-crystalline-Si BSF layer is deposited using a chemical-vapor-deposition (CVD) technique, wherein the thickness of the heavily doped epitaxial mono-crystalline-Si BSF layer is between 1 μm and 10 μm, and wherein the doping concentration for the heavily doped epitaxial mono-crystalline-Si BSF layer is between 1×10 17 /cm 3 and 1×10 20 /cm 3 .

5. The heterojunction solar cell of claim 1 , wherein the lightly doped epitaxial mono-crystalline-Si base layer is deposited using a CVD technique, wherein the thickness of the lightly doped epitaxial mono-crystalline-Si base layer is between 5 μm and 100 μm, and wherein the doping concentration for the lightly doped crystalline-Si base layer is between 1×10 16 /cm 3 and 1×10 17 /cm 3 .

6. The heterojunction solar cell of claim 1 , wherein the passivation layer includes at least one of: undoped a-Si and SiO x .

7. The heterojunction solar cell of claim 1 , wherein the heavily doped a-Si layer is deposited using a CVD technique, wherein the thickness of the heavily doped a-Si layer is between 1 nm and 50 nm, and wherein the doping concentration for the heavily doped a-Si layer is between 1×10 17 /cm 3 and 1×10 20 /cm 3 .

8. The heterojunction solar cell of claim 1 , wherein the heavily doped mono-crystalline-Si BSF layer and lightly doped mono-crystalline-Si base layer are p-type doped, and wherein the heavily doped a-Si layer is n-type doped.

9. The heterojunction solar cell of claim 1 , wherein the heavily doped mono-crystalline-Si BSF layer and lightly doped mono-crystalline-Si base layer are n-type doped, and wherein the heavily doped a-Si layer is p-type doped.

10. The heterojunction solar cell of claim 1 , wherein a thickness of the passivation layer is between 1 nm and 15 nm.

Assignments (3)
MERGER AND CHANGE OF NAME Recorded May 17, 2016
From: SILEVO, INC.; SUNFLOWER ACQUISITION LLC
To: SILEVO, LLC.
Reel/Frame 038620/0023 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 4, 2015
From: SILEVO LLC
To: SOLARCITY CORPORATION
Reel/Frame 035559/0179 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 26, 2013
From: YU, CHENTAO; HENG, JIUNN BENJAMIN; XU, ZHENG; FU, JIANMING
To: SILEVO, INC.
Reel/Frame 031291/0889 →
Continuity (2)
Continuation In Part 12401314 · Mar 10, 2009
Related Publication 20130112265A1 · May 9, 2013