Low temperature hermetic sealing via laser
View Patent ↗A method and apparatus for low temperature laser sealing of bonded articles is disclosed. Hermetic sealing of glass substrates using low temperature sealing techniques that do not adversely affect bulk strength of glass substrates, the environment created between the substrates and/or any components housed within the sealed glass substrates is disclosed. Such low temperature sealing techniques include use of localized laser heating of sealing materials to form a hermetic seal between glass substrates that does not involve heating the entire article to be sealed.
1. A vacuum insulated glass (VIG) window unit, comprising:
first and second substantially parallel spaced apart substrates comprising glass that are bonded together by an edge seal, said first and second substrates and said edge seal defining a cavity having a pressure lower than atmospheric pressure;
wherein said edge seal is located proximate a periphery of the first and second substrates but is not located in a central area of the VIG window unit, and wherein said edge seal comprises (i) a meltable metallic or substantially metallic layer; and (ii) an absorber film; and
wherein the absorber film comprises both a dielectric layer and a metallic or substantially metallic layer, wherein the dielectric layer directly contacts at least one of the first and second glass substrates.
2. The vacuum insulated glass window unit of claim 1 , wherein said absorber film is at least partially diffused into said meltable metallic or substantially metallic layer.
3. The vacuum insulated glass window unit of claim 1 , wherein said edge seal comprises first and second absorber films, said first absorber film being located between the first substrate and the meltable metallic or substantially metallic layer, and the second absorber film being located between the second substrate and the meltable metallic or substantially metallic layer,
wherein each of the first and second absorber films comprises both a dielectric layer and a metallic or substantially metallic layer.
4. The vacuum insulated glass window unit of claim 1 , wherein said dielectric layer of the absorber film comprises silicon and/or silicon nitride.
5. The vacuum insulated glass window unit of claim 1 , wherein said (i) meltable metallic or substantially metallic layer comprises solder.
6. The vacuum insulated glass window unit of claim 1 , wherein said dielectric layer of the absorber film comprises silicon rich silicon nitride characterized by Si z N x where z/x is at least 0.78.
7. The vacuum insulated glass window unit of claim 1 , wherein said dielectric layer of the absorber film comprises silicon nitride and the metallic or substantially metallic layer of the absorber film comprises Ni and/or Cr.
8. The vacuum insulated glass window unit of claim 1 , wherein the metallic or substantially metallic layer of the absorber film comprises Ni and Cr.
9. The vacuum insulated glass window unit of claim 1 , wherein the absorber film is configured to heat up and melt the adjacent (i) meltable metallic or substantially metallic film upon incident laser radiation.