Methods and structures for forming and protecting thin films on substrates
View Patent ↗A method for forming of a thin film on a substrate is disclosed. The method includes cleaning a process chamber by flowing a first gas having fluorine. The method also includes coating the process chamber with a first encapsulating layer including amorphous silicon (A-Si) by flowing a second gas for a first duration, where the first encapsulating layer protects against fluorine contamination. The method further includes loading a substrate into the process chamber, depositing a thin film on the substrate by flowing a third gas into the process chamber and unloading the substrate from the process chamber. The thin film can include silicon nitride (SiN), the first gas can include nitrogen triflouride (NF 3 ) gas and second gas can include silane (SiH 4 ) gas. The thin film can be formed using plasma-enhanced chemical vapor deposition. The substrate can be a solar cell or a liquid crystal display (LCD).
1. A method for forming a thin film on a substrate, the method comprising:
cleaning a process chamber by flowing a first gas comprising fluorine into the process chamber;
after flowing the first gas comprising fluorine into the process chamber, coating the process chamber with a first encapsulating layer comprising amorphous silicon by flowing a second gas for a first duration into the process chamber, wherein the first encapsulating layer protects against fluorine contamination;
after coating the process chamber with the first encapsulating layer, loading a substrate into the process chamber;
depositing a thin film on the substrate by flowing a third gas into the process chamber; and
unloading the substrate from the process chamber.
2. The method of claim 1 , wherein the thin film is a silicon nitride (SiN) film.
3. The method of claim 1 , wherein the first gas comprises nitrogen triflouride (NF3).
4. The method of claim 1 , wherein the second gas comprises silane (SiH4).
5. The method of claim 1 , wherein the third gas comprises a gas selected from the group containing silane (SiH4), ammonia (NH3) and nitrogen (N2).
6. The method of claim 1 , wherein the first duration is in the range of 0.5-5 minutes.
7. The method of claim 1 , wherein the substrate is a solar cell.
8. The method of claim 7 , wherein forming a thin film on the substrate comprises forming an anti-reflective coating (ARC) comprising a silicon nitride film on the solar cell.
9. The method of claim 1 , wherein the substrate is a liquid crystal display (LCD).
10. The method of claim 9 , wherein forming a thin film on a liquid crystal display (LCD) comprises forming an insulating layer on a liquid crystal display (LCD).
11. A method for forming a silicon nitride film on a solar cell, the method comprising:
cleaning a process chamber to remove excess silicon nitride (SiN) by flowing a first gas comprising fluorine into the process chamber;
after flowing the first gas into the process chamber, coating the process chamber with amorphous silicon by flowing a second gas for a first duration into the process chamber, wherein amorphous silicon forms a first encapsulating layer protecting against fluorine contamination;
loading a solar cell in the process chamber;
depositing a silicon nitride film on the solar cell by plasma-enhanced chemical vapor deposition; and
unloading the solar cell from the process chamber.
12. The method of claim 11 , wherein the first gas comprises nitrogen triflouride (NF3).
13. The method of claim 11 , wherein the second gas comprises silane (SiH4).
14. The method of claim 11 , wherein the third gas comprises a gas is selected from the group containing silane (SiH4), ammonia (NH3) and nitrogen (N2).
15. The method of claim 11 , wherein the first duration is in the range of 0.5-5 minutes.
16. The method of claim 11 , wherein amorphous silicon forms a first encapsulating layer with a thickness in the range of 0.05-0.5 microns.
17. A method for forming a silicon nitride film on a solar cell, the solar cell having a front side configured to face the sun during normal operation and a back side opposite the front side, and the method comprising:
cleaning a process chamber to remove excess silicon nitride (SiN) by flowing nitrogen triflouride (NF3) gas into the process chamber;
after flowing the NF3 gas into the process chamber, coating the process chamber with amorphous silicon by flowing silane (SiH4) gas for at most 5 minutes into the process chamber, wherein the amorphous silicon forms a first encapsulating layer protecting against fluorine contamination;
after coating the process chamber with amorphous silicon, loading a solar cell in the process chamber;
depositing an anti-reflective coating (ARC) comprising a silicon nitride (SiN) film on the front side of the solar cell by plasma-enhanced chemical vapor deposition (PECVD) of silane (SiH4), ammonia (NH3) and nitrogen (N2) gas; and
unloading the solar cell from the process chamber.
18. The method of claim 17 , wherein forming a silicon nitride (SiN) film on a front side of a solar cell comprises forming an anti-reflective coating on a back side (BARC) of a solar cell.
19. The method of claim 17 , wherein the solar cell comprises a solar cell selected from the group containing a back-contact solar cell, front-contact solar, monocrystalline silicon solar cells, polycrystalline silicon solar cells, amorphous silicon solar cells, thin film silicon solar cells, copper indium gallium selenide (CIGS) solar cells, and cadmium telluride solar cells.
20. The method of claim 17 , wherein amorphous silicon forms a first encapsulating layer with a thickness in the range of 0.05-0.5 microns.