Method of processing a semiconductor assembly
View Patent ↗A method for processing a semiconductor assembly is presented. The method includes: (a) contacting at least a portion of a semiconductor assembly with a chalcogen source, wherein the semiconductor assembly comprises a semiconductor layer comprising a semiconductor material disposed on a support; (b) introducing a chalcogen from the chalcogen source into at least a portion of the semiconductor material; and (c) disposing a window layer on the semiconductor layer after the step (b).
1. A method, comprising:
(a) contacting at least a portion of a semiconductor assembly with a chalcogen source, wherein the semiconductor assembly comprises a semiconductor layer comprising a semiconductor material disposed on a support, wherein the step (a) comprises disposing a chalcogen source layer comprising the chalcogen source in contact with the semiconductor layer;
(b) introducing a chalcogen from the chalcogen source into at least a portion of the semiconductor material;
(c) removing the chalcogen source layer; and
(d) disposing a window layer on the semiconductor layer after the steps (b) and (c).
2. The method of claim 1 , wherein the window layer is substantially free of cadmium sulfide.
3. The method of claim 1 , wherein the window layer comprises a metallic species and a non-metallic species, wherein the metallic species comprises zinc, magnesium, tin, or combinations thereof and the non-metallic species comprises oxygen, sulfur, hydrogen, or combinations thereof.
4. The method of claim 1 , wherein the chalcogen comprises sulfur, selenium, or combinations thereof.
5. The method of claim 1 , wherein the chalcogen source comprises cadmium sulfide, oxygenated cadmium sulfide, cadmium sulfite, cadmium sulfate, cadmium selenide, hydrogen sulfide, hydrogen selenide, or combinations thereof.
6. The method of claim 1 , wherein the chalcogen source comprises cadmium sulfide, oxygenated cadmium sulfide, cadmium sulfite, cadmium sulfate, or combinations thereof.
7. The method of claim 1 , wherein the step of contacting the semiconductor assembly with a chalcogen source comprises physical vapor deposition, atomic layer deposition, chemical bath deposition, electrochemical deposition, chemical vapor deposition, close-space sublimation, or combinations thereof.
8. The method of claim 1 , wherein the chalcogen source layer has a thickness in a range from about 20 nanometers to about 200 nanometers.
9. The method of claim 1 , wherein the step (a) further comprises heating the semiconductor assembly at a temperature greater than about 600 degrees Celsius.
10. The method of claim 1 , wherein the step (a) further comprises heating the semiconductor assembly at a temperature in a range from about 600 degrees Celsius to about 700 degrees Celsius.
11. The method of claim 1 , wherein the step (b) comprises introducing the chalcogen into at least a portion of the semiconductor material such that an average atomic concentration of the chalcogen in the semiconductor layer decreases in a direction away from the window layer and towards the support.
12. The method of claim 1 , wherein the step (b) comprises introducing the chalcogen into at least a portion of the semiconductor material such that an average atomic concentration of the chalcogen is substantially constant across the thickness of the semiconductor layer.
13. The method of claim 1 , further comprising disposing a capping layer on the chalcogen source layer.
14. The method of claim 13 , further comprising removing the cap layer and the chalcogen source layer prior to the step of disposing a window layer.
15. The method of claim 1 , wherein the step (d) of disposing the window layer comprises physical vapor deposition, atomic layer deposition, chemical bath deposition, electrochemical deposition, chemical vapor deposition, close-space sublimation, or combinations thereof.
16. The method of claim 1 , wherein the semiconductor material comprises cadmium telluride, zinc telluride, magnesium telluride, cadmium zinc telluride, cadmium sulfur telluride, cadmium manganese telluride, cadmium magnesium telluride, or combinations thereof.
17. A method, comprising:
(a) contacting at least a portion of a semiconductor assembly with a chalcogen source, wherein the semiconductor assembly comprises a semiconductor layer comprising a semiconductor material disposed on a support;
(b) disposing a layer comprising the chalcogen source in contact with at least a portion of the semiconductor layer;
(c) introducing a chalcogen from the chalcogen source into at least a portion of the semiconductor material;
(d) removing the chalcogen source layer; and
(e) disposing a window layer on the semiconductor layer after the steps (c) and (d), wherein the window layer is substantially free of cadmium sulfide.