IP Library Granted Patent US 9,314,898
Granted Patent B2
US 9,314,898 · App. 13/636,299 · Granted Apr 19, 2016

Polishing pad

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Quick Facts
Patent No.
US 9,314,898
App. No.
13/636,299
Granted
Apr 19, 2016
Kind
B2
Abstract

An object of the present invention is to provide a polishing pad having high planarization property and capable of making it possible to suppress the occurrence of scratches. A polishing pad of the present invention has a polishing layer having oval cells each with a long axis inclined by 5° to 45° with respect to the direction of the thickness of the polishing layer.

Claims (4)

1. A polishing pad, comprising a polishing layer having oval cells each with a long axis inclined by 30° to 45° with respect to the direction of the thickness of the polishing layer, at least some of the oval cells being closed so as to contain a gas,

wherein the oval cells have a ratio (L/S) of average long axis length L to average short axis length S of 1.5 to 3, and

the ratio of the number of the oval cells to the number of all cells is at least 80%.

2. The polishing pad according to claim 1 , wherein the polishing layer comprises a polyurethane resin foam.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 21, 2016
From: TOYO TIRE & RUBBER CO., LTD.
To: ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.
Reel/Frame 038053/0218 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 4, 2012
From: KAZUNO, ATSUSHI
To: TOYO TIRE & RUBBER CO., LTD.
Reel/Frame 029073/0822 →