Optical MEMS scanning micro-mirror with anti-speckle cover

1. Optical MEMS scanning micro-mirror device comprising: a movable scanning micro-mirror, being pivotally connected to a MEMS body-for deflecting a light beam;

a layer of deformable transparent material arranged to be traversed by said light beam;

a piezo-actuator assembly cooperating with said transparent material so that when actuated, the piezo-actuator assembly causes micro-deformation of the transparent material so as to reduce speckle, wherein the piezo-actuator assembly is configured such that, during operation it is actuated with a temporal frequency adapted to change the deformation within one single pixel, between each pixel or between each successive frame.

2. Optical MEMS scanning micro-mirror according to claim 1 , further comprising:

a package with a transparent window substantially above a reflection side of the micro-mirror, said layer of deformable transparent being unitary with said window.

3. Optical MEMS scanning micro-mirror according to claim 2 , further comprising:

a substrate under a back face of said mirror;

wherein said piezo-actuator assembly and said layer of deformable transparent material are provided on the outer portion of said window;

wherein said piezo-actuator assembly is arranged at the periphery of the layer of transparent material.

4. Optical MEMS scanning micro-mirror according to claim 1 , wherein the piezo-actuator assembly is substantially circumferential.

5. Optical MEMS scanning micro-mirror according to claim 1 , wherein the piezo-actuator assembly is provided with a plurality of piezo-elements circumferentially arranged around the transparent material.

6. Optical MEMS scanning micro-mirror according to claim 1 , wherein the window is provided with a substantially flat outer face on which the piezo-actuator assembly and the transparent material are attached.

7. Optical MEMS scanning micro-mirror according to claim 1 , wherein the piezo-actuator assembly, the transparent layer and the window are fabricated at wafer-level.

8. A micro-projection system for projecting light on a projection surface comprising:

at least one coherent light source;

optical elements, in the optical path between said coherent light source and said projection surface,

an optical MEMS scanning micro-mirror according to claim 1 .

9. A method for reducing speckle in a micro-projection system adapted for projecting light on a projection surface, comprising:

providing a light with at least one coherent light source;

directing light from the light source to the projection surface;

providing a scanning micro-mirror for deviating light from said light source so as to scan a projected image onto said projecting surface;

providing a layer of deformable transparent material arranged to be traversed by said light beam; and

providing a piezo-actuator assembly cooperating with said transparent material so that when actuated, the piezo-actuator assembly causes micro-deformation of the transparent material, wherein the piezo-actuator assembly is actuated with a temporal frequency adapted to change the deformation within one single pixel, between each pixel or between each successive frame, so as to reduce speckle.

10. A method for reducing speckle in a micro-projection system according to claim 9 , wherein the piezo-actuator assembly is actuated so as to create deformations of the transparent material with a spatial wavelength shorter than the average outer dimension of the transparent material, thus creating waves in said transparent material.

11. A method for manufacturing an optical MEMS scanning micro-mirror, comprising:

providing a MEMS micro-mirror for deflecting a light beam;

providing a transparent substrate arranged to be traversed by said light beam;

deposing on one side of the substrate, a piezo-actuator assembly which can be used to cause micro-deformation of a deformable material, said assembly forming a substantially central cavity; and

providing said cavity with a layer of deformable transparent material;

cooperating said piezo-actuator assembly with said deformable transparent material;

configuring the said piezo-actuator assembly so that during operation it can be actuated with a temporal frequency adapted to change the deformation within one single pixel, between each pixel or between each successive frame, so as to reduce speckle.

12. A method for manufacturing an optical MEMS scanning micro-mirror according to claim 11 , wherein said piezo-actuator assembly is obtained by:

deposing a metallic layer on the surface of the substrate, for forming an electrode;

removing the excess of material to leave a substantially circumferential portion for receiving the piezo material;

deposing piezo material on said electrode portion;

removing the excess of piezo material to leave a substantially circumferential piezo-actuator assembly;

deposing a metallic layer on said piezo-actuator assembly; and

providing at least one layer of deformable transparent material within the piezo-actuator assembly.

13. A method for manufacturing an optical MEMS scanning micro-mirror according to claim 11 , further comprising the step of providing a spacer wafer on said substrate, on the side opposite to said piezo-actuator assembly.

14. A method for manufacturing an optical MEMS scanning micro-mirror according to claim 13 , further comprising the step of attaching the substrate window to the reflection side of the micro-mirror.

15. An Optical MEMS scanning micro-mirror device comprising:

a movable scanning micro-mirror, being pivotally connected to a MEMS body for deflecting a light beam;

a layer of deformable transparent material arranged to be traversed by said light beam;

a piezo-actuator assembly cooperating with said transparent material so that when actuated, the piezo-actuator assembly causes micro-deformation of the transparent material, wherein the piezo-actuator assembly is configured such that during operation it can be actuated so as to create deformations of the transparent material with a spatial wavelength shorter than the average outer dimension of the transparent material, thus creating waves in said transparent material, so as to reduce speckle.

16. A method for reducing speckle in a micro-projection system adapted for projecting light on a projection surface, comprising:

providing a light with at least one coherent light source;

directing light from the light source to the projection surface);

providing a scanning micro-mirror for deviating light from said light source so as to scan a projected image onto said projecting surface;

providing a layer of deformable transparent material arranged to be traversed by said light beam;

providing a piezo-actuator assembly cooperating with said transparent material so that when actuated, the piezo-actuator assembly causes micro-deformation of the transparent material, wherein the piezo-actuator assembly is actuated so as to create deformations of the transparent material with a spatial wavelength shorter than the average outer dimension of the transparent material, thus creating waves in said transparent material, so as to reduce speckle.

17. A method for reducing speckle in a micro-projection system according to claim 16 , wherein the piezo-actuator assembly is actuated with a temporal frequency adapted to change the deformation within one single pixel, between each pixel or between each successive frame.

18. A method for manufacturing an optical MEMS scanning micro-mirror, comprising:

providing a MEMS micro-mirror for deflecting a light beam;

providing a transparent substrate arranged to be traversed by said light beam;

deposing on one side of the substrate, a piezo-actuator assembly which can be used to cause micro-deformation of a deformable material, said assembly forming a substantially central cavity;

providing said cavity with a layer of deformable transparent material;

cooperating said piezo-actuator assembly with said deformable transparent material;

configuring the said piezo-actuator assembly, so that when actuated, the piezo-actuator assembly can cause micro-deformation having a spatial wavelength shorter than the average outer dimension of the transparent material, so as to reduce speckle.