Bonding tool, electronic component mounting apparatus, and manufacturing method of bonding tool

1. A bonding tool comprising:

a horn that transmits an ultrasonic vibration;

an ultrasonic vibrator that is provided at one end of the horn, and generates the ultrasonic vibration; and

an electronic component holding part that holds an electronic component, wherein the electronic component holding part has a male fitting part, and an electronic component holding face that holds the electronic component on an opposite side to the male fitting part,

a female fitting part in a shape according to a shape of the male fitting part is formed in a predetermined face of the horn,

the male fitting part is fitted into the female fitting part via an adhesion layer

the male fitting part is a ridge whose cross-sectional shape is trapezoidal,

the female fitting part is a groove whose cross-sectional shape is trapezoidal,

a top face of the ridge contacts a bottom face of the groove via the adhesion layer,

a width of the top face of the ridge is larger than a width of the bottom face of the groove,

the horn is in a shape whose longer direction is a direction in which the ultrasonic vibration is transmitted,

the groove is formed in a face on a lower side of the horn, in a direction orthogonal to the longer direction, and

a thickness of the adhesion layer between the top face of the ridge and the bottom face of the groove is larger than a thickness of the adhesion layer between a side face of the ridge and a side face of the groove, the side face of the ridge contacts via the adhesion layer, so that (i) a vibration of the horn in the direction in which the ultrasonic vibration is transmitted propagates to the electronic component holding part without being absorbed by the adhesion layer between the side face of the ridge and the side face of the groove, the side face of the ridge contacts via the adhesion layer, and (ii) swell of the horn in a direction orthogonal to the electronic component holding face, which is generated by the vibration of the horn, is absorbed by the adhesion layer between the top face of the ridge and the bottom face of the groove.

2. The bonding tool according to claim 1 , wherein

200 μm or less is the thickness of the adhesion layer.

3. The bonding tool according to claim 1 , wherein

1/10 or more is a ratio (height/width) of a height of the electronic component holding part in the direction orthogonal to the electronic component holding face to a width of the electronic component holding part in the direction in which the ultrasonic vibration is transmitted.

4. The bonding tool according to claim 1 , wherein

Young's modulus of a material that constitutes the horn is larger than Young's modulus of a material that constitutes the adhesion layer, and

Young's modulus of a material that constitutes the electronic component holding part is larger than the Young's modulus of the material that constitutes the adhesion layer.

5. The bonding tool according to claim 1 , wherein

a material that constitutes the adhesion layer is a brazing material.

6. An electronic component mounting apparatus, comprising:

a circuit board holding part that holds a circuit board;

an electronic component supplying part that supplies the electronic component; and

an electronic component mounting unit that mounts, on the held circuit board, the supplied electronic component, wherein

the electronic component mounting unit has an electronic component mounting part,

the electronic component mounting part has a pressing unit, and the bonding tool according to claim 1 , and

the pressing unit presses, via the electronic component holding part of the bonding tool, the electronic component against the circuit board.

7. A manufacturing method of the bonding tool according to claim 1 , comprising:

a male fitting part forming step of forming the male fitting part;

a female fitting part forming step of forming the female fitting part;

a brazing material arranging step of arranging a brazing material for forming the adhesion layer between the male fitting part and the female fitting part; and

a fitting step of forming the adhesion layer by heating the male fitting part and the female fitting part in a thermostatic bath with pressurization using a predetermined jig, and fitting the male fitting part into the female fitting part.