Wafer carrier
A wafer carrier comprises a supporting body having an opening therein, wherein said opening in said supporting body has a concave sidewall and a bottom surface in said supporting body which is curved in cross section; a plurality of vertical supporting rods configured to support and contact a wafer received in said opening and to displace said wafer from the bottom surface of the opening in said supporting body; wherein one of said supporting rods has an end for contacting and supporting said wafer; and wherein when viewing from a top view of the wafer carrier, one of said supporting rods has a base lining on the concave sidewall of said opening in said supporting body, a first concave side opposite to the base and two second concave sides connecting the base and the first concave side.
1. A wafer carrier comprising:
a supporting body having an opening therein, wherein
said opening in said supporting body has a concave sidewall and a bottom surface in said supporting body which is curved in cross section;
a plurality of supporting rods configured to support and contact a wafer received in said opening and to displace said wafer from the bottom surface of the opening in said supporting body; wherein one of said supporting rods has an end for contacting and supporting said wafer; and wherein when viewing from a top view of the wafer carrier, one of said supporting rods has a base lining on the concave sidewall of said opening in said supporting body, a first concave side opposite to the base and two second concave sides connecting the base and the first concave side.
2. The wafer carrier of claim 1 , wherein the plurality of supporting rods are in contact with the concave sidewall of the opening for receiving a semiconductor wafer in the supporting body and supporting the semiconductor wafer on its outer periphery.
3. The wafer carrier as claimed in claim 1 , wherein the shape of the opening is approximately circular from a top view.
4. The wafer carrier as claimed in claim 3 , wherein the shape of the opening further comprises a flat edge from a top view.
5. The wafer carrier as claimed in claim 1 , wherein the bottom surface comprises an edge and a center.
6. The wafer carrier as claimed in claim 5 , wherein the center of the bottom surface has a height greater than a height of the edge of the bottom surface.
7. The wafer carrier as claimed in claim 5 , wherein the center of the bottom surface has a height smaller than a height of the edge of the bottom surface.
8. The wafer carrier as claimed in claim 5 , wherein a height difference between heights of the center and the edge of the bottom surface is between 15 μm and 1000 μm.
9. The wafer carrier as claimed in claim 8 , wherein the opening can accommodate the wafer having a diameter between 2 inches and 8 inches.
10. The wafer carrier as claimed in claim 9 , wherein the height difference is proportional to a diameter of the wafer.
11. The wafer carrier as claimed in claim 1 , wherein one of the plurality of supporting rods comprises two different arcs with two different curvatures.
12. The wafer carrier as claimed in claim 1 , wherein the plurality of supporting rods comprises at least three supporting rods.
13. The wafer carrier as claimed in claim 1 , wherein each of the plurality of supporting rods comprises a height smaller than the height of the supporting body.
14. The wafer carrier as claimed in claim 13 , wherein the plurality of supporting rods is above the bottom surface.
15. The wafer carrier as claimed in claim 1 , wherein the material of the supporting body or the supporting rod comprises composite material, semiconductor material, conductive material or non-conductive material.
16. A manufacturing method of a wafer carrier, comprising:
forming an epitaxial layer on a wafer to form a wafer structure;
measuring a curvature radius of the wafer structure; and
providing the wafer carrier as claimed in claim 1 in accordance with the curvature radius of the wafer structure.