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App. No. 13/654,461 · Confirmation No. 1089

METHODS FOR DEPOSITING A HOMOGENEOUS FILM VIA SPUTTERING FROM AN INHOMOGENEOUS TARGET

Applicant: First Solar, Inc.
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Quick Facts
App. No.
13/654,461
Filed
2012-10-18
Pub. No.
US20140110246A1
Art Unit
1754