VIBRATION DEVICE AND OSCILLATOR
A vibration device according to an embodiment of the present invention includes a base, a lid body bonded to the base to form a cavity and a vibrating reed housed in the cavity. The vibrating reed includes a main body and an extended portion extending in a short side direction of the main body, and in the vibrating reed, the extended portion is supported by a first connection portion arranged on the base and the main body is supported by a second connection portion in a cantilever manner. Accordingly, when ambient temperature changes and a stress is applied between the first and second connection portions, the stress is alleviated by the extended portion.
1 . A vibration device comprising:
a base;
a lid body bonded to the base to form a cavity; and
a vibrating reed housed in the cavity,
wherein the vibrating reed includes a flat main body having a rectangular shape, and an extended portion extending in a short side direction of the rectangular shape at one corner portion of the main body,
the main body has two excitation electrodes for exciting vibration,
the extended portion has a first terminal electrically connected to one excitation electrode,
the main body has a second terminal electrically connected to the other excitation electrode and arranged in the vicinity of a short side where the extended portion is installed, and
the base has a first connection portion connected to the first terminal on a surface facing the cavity and a second connection portion connected to the second terminal, thereby supporting the vibrating reed by the first and second connection portions in a cantilever manner.
2 . The vibration device according to claim 1 ,
wherein the second connection portion is connected to an approximate center of a width in the short side direction of the main body.
3 . The vibration device according to claim 1 ,
wherein the extended portion is formed in a shape of an L-shaped arm in plan view of a surface of the flat main body seen from a vertical direction, in which one end of the L-shaped arm is connected to the main body and the first connection portion is connected in the vicinity of the other end of the L-shaped arm.
4 . The vibration device according to claim 3 ,
wherein one side of the L-shaped arm is extended in the short side direction of the main body and the other side of the L-shaped arm is in parallel to a longitudinal direction of the main body toward a direction of an opposite side of the short side where the extended portion is installed.
5 . The vibration device according to claim 1 ,
wherein the extended portion has a concave shape or a spiral shape in plan view of a surface of the flat main body seen from a vertical direction, one end of the concave shape or the spiral shape is connected to the main body and the first connection portion is connected in the vicinity of the other end thereof.
6 . The vibration device according to claim 1 ,
wherein the vibrating reed is an AT cut crystal vibrating reed.
7 . The vibration device according to claim 1 ,
wherein the first and second connection portions are formed by using metal bumps.
8 . The vibration device according to claim 7 ,
wherein the metal bumps are gold bumps.
9 . The vibration device according to claim 1 ,
wherein the base includes a first wiring electrically connected to the first connection portion, a second wiring electrically connected to the second connection portion, and first and second through electrodes piercing through the base as well as electrically connected to the first and second wirings respectively.
10 . An oscillator comprising:
the vibration device according to claim 1 ; and
a drive circuit supplying drive signals to the vibration device.