Method for producing nitride crystal and nitride crystal
View Patent ↗A high-quality nitride crystal can be produced efficiently by charging a nitride crystal starting material that contains tertiary particles having a maximum diameter of from 1 to 120 mm and formed through aggregation of secondary particles having a maximum diameter of from 100 to 1000 μm, in the starting material charging region of a reactor, followed by crystal growth in the presence of a solvent in a supercritical state and/or a subcritical state in the reactor, wherein the nitride crystal starting material is charged in the starting material charging region in a bulk density of from 0.7 to 4.5 g/cm 3 for the intended crystal growth.
1. A method for producing a nitride crystal, comprising:
charging into a reactor a nitride crystal starting material that contains tertiary particles having a maximum diameter of from 1 to 120 mm and formed through aggregation of secondary particles having a maximum diameter of from 100 to 1000 μm; and
growing a crystal in the presence of a solvent in a supercritical state and/or a subcritical state in the reactor,
wherein the nitride crystal starting material charged into the reactor is present in a starting material charging region of the reactor, and the nitride crystal starting material present in the starting material charging region has a bulk density of from 0.7 to 4.5 g/cm 3 .
2. The method for producing a nitride crystal according to claim 1 , wherein the bulk density is from 0.8 to 3.6 g/cm 3 .
3. The method for producing a nitride crystal according to claim 1 , wherein the nitride crystal starting material has an angle of repose of less than 45°.
4. The method for producing a nitride crystal according to claim 1 , wherein a reticulated structure is formed in the starting material charging region.
5. The method for producing a nitride crystal according to claim 4 , wherein the nitride crystal starting material is filled in the reticulated structure and then placed in the starting material charging region.
6. The method for producing a nitride crystal according to claim 1 , wherein the nitride crystal starting material has a dissolution rate of at least 40%.
7. The method for producing a nitride crystal according to claim 1 , wherein the nitride crystal is grown in the c-axis direction at a growth rate of at least 100 μm/day.
8. The method for producing a nitride crystal according to claim 1 , wherein the bulk density is from 1.1 to 3.0 g/cm 3 .
9. The method for producing a nitride crystal according to claim 8 , wherein the nitride crystal starting material comprises a polycrystal or a single crystal of a Group 13 nitride.
10. The method for producing a nitride crystal according to claim 8 , wherein the nitride crystal starting material is GaN polycrystal.