Non-permeable substrate carrier for electroplating
View Patent ↗One embodiment relates to a substrate carrier for use in electroplating a plurality of substrates. The substrate carrier comprises a non-conductive carrier body on which the substrates are to be held. Electrically-conductive lines are embedded within the carrier body, and a plurality of contact clips are coupled to the electrically-conductive lines embedded within the carrier body. The contact clips hold the substrates in place and electrically couple the substrates to the electrically-conductive lines. The non-conductive carrier body is continuous so as to be impermeable to flow of electroplating solution through the non-conductive carrier body. Other embodiments, aspects and features are also disclosed.
1. A substrate carrier for use in electroplating a plurality of substrates, the substrate carrier comprising:
a non-conductive carrier body on which the substrates are to be held;
electrically-conductive lines embedded within the carrier body; and
a plurality of contact clips which are coupled to the electrically-conductive lines embedded within the carrier body, the contact clips holding the substrates in place and electrically coupling the substrates to the electrically-conductive lines,
wherein an entirety of the non-conductive carrier body is continuous so as to be impermeable to flow of electroplating solution through the non-conductive carrier body.
2. The substrate carrier of claim 1 , further comprising:
a plurality of spacing features on the non-conductive carrier body, the spacing features being configured to space the substrates from a top surface of the non-conductive carrier body when the substrates are clipped onto the substrate carrier.
3. The substrate carrier of claim 1 , further comprising:
a plurality of aligning features on the non-conductive carrier body, wherein the aligning features are arranged to surround and align the substrates placed on the substrate carrier.
4. The substrate carrier of claim 3 , wherein the aligning features are configured to be removable from the carrier body and replaceable with new aligning features.
5. The substrate carrier of claim 4 , wherein the aligning features comprise pegs.
6. The substrate carrier of claim 5 , wherein the pegs are tapered.
7. The substrate carrier of claim 1 , further comprising:
an electrically-conductive bus bar configured at a top side of the non-conductive carrier body and conductively coupled to the electrically-conductive lines embedded in the non-conductive carrier body.
8. The substrate carrier of claim 7 , further comprising:
a plurality of mounting holes in the bus bar for mounting the substrate carrier onto a work arm for dipping the non-conductive carrier body into, and raising the non-conductive carrier body out of, an electroplating bath while a voltage is applied to the bus bar.