Granted Patent B1

US 8,844,120 · App. 13/662,255 · Granted Sep 30, 2014

Abstract

Claims (47)

1. A method for providing a magnetic transducer including an underlayer, the method comprising:

providing a recessed region in the underlayer, the recessed region including a front having an angle from horizontal, the angle being greater than zero and less than ninety degrees;

providing an assist pole layer in the recessed region;

providing a main pole layer, a portion of the main pole layer residing on the assist pole layer;

defining a main pole from the assist pole layer and the main pole layer;

providing a write gap on at least a portion of the main pole layer, the step of providing the write gap further including

depositing a first write gap layer on the at least the portion of the main pole layer;

providing a planarization stop layer on the first write gap layer;

providing a second write gap layer on the planarization stop layer; and

performing a planarization, the planarization terminating before the planarization stop layer is completely removed; and

providing a shield on the write gap.

2. The method of claim 1 wherein the angle is at least fifteen degrees and not more than seventy-five degrees.

3. The method of claim 2 wherein the angle is at least forty degrees and not more than fifty degrees.

4. The method of claim 1 wherein the step of providing the recessed region further includes:

providing a mask, the mask exposing a portion of the underlayer in the recessed region;

ion milling the portion of the underlayer.

5. The method of claim 1 wherein the step of providing the shield on the write gap further includes:

depositing a spacer layer after the planarization step;

removing a portion of the second write gap layer on the planarization stop layer in a first region; and

providing a portion of the shield in the first region.

6. The method of claim 1 wherein the step of providing the shield on the write gap further includes:

removing a portion of the second write gap layer on the planarization stop layer in a first region; and

providing a portion of the shield in the first region.

7. The method of claim 1 wherein the planarization includes a chemical mechanical planarization.

8. The method of claim 1 wherein the front is recessed from an air bearing surface region.

9. The method of claim 1 wherein the front resides substantially at an air bearing surface.

10. A method for providing a magnetic transducer, the magnetic transducer including an underlayer, the method comprising:

providing a mask, the mask exposing a portion of the underlayer;

ion milling the portion of the underlayer to provide a recessed region in the underlayer, the recessed region including a front having an angle from horizontal, the angle being at least fifteen and less than seventy-five degrees;

depositing an assist pole layer in the recessed region;

removing the mask;

providing a main pole layer, a portion of the main pole layer residing on the assist pole layer;

depositing a first a-write gap layer on the at least the portion of the main pole layer;

providing a planarization stop layer on the first write gap layer;

providing a second write gap layer on the planarization stop layer;

performing a first planarization, the first planarization terminating before the planarization stop layer is completely removed;

providing a hard mask for defining a main pole;

defining a main pole from the assist pole layer and the main pole layer;

trimming the main pole;

providing an insulating layer;

performing a second planarization;

depositing a spacer layer after the second planarization step;

removing a portion of the second write gap layer on the planarization stop layer in a first region adjoining the ABS; and

providing a portion of a shield in the first region.

11. The method of claim 10 wherein the angle is at least forty degrees and not more than fifty degrees.

12. The method of claim 11 wherein the front is recessed from an air bearing surface region.

13. The method of claim 11 wherein the front resides substantially at an air bearing surface.

Assignments (9)