Optical sensor device and method of manufacturing the same
Provided is a high-reliability, compact, and low-cost optical sensor device. The optical sensor device includes a glass lid substrate ( 2 ), a glass substrate ( 9 ) with a cavity having divided and exposed through-hole electrodes ( 5 ) on the periphery thereof, and an optical sensor element ( 3 ) mounted on the glass lid substrate, and has a structure in which the glass lid substrate and the glass substrate with a cavity are bonded together. By hermetically sealing with the glass substrates, high reliability is secured. By using the divided through-hole electrodes, the package size is reduced and the number of devices which can be produced in a batch in the manufacture increases, which enables cost reduction.
1. An optical sensor device, comprising:
a glass substrate with a cavity;
a glass lid substrate bonded to the glass substrate with the cavity;
a through-hole electrode dispose on an outside side surface of the glass substrate with the cavity;
a wiring electrode connected to the through-hole electrode, and disposed on an upper surface of the glass substrate with the cavity;
an external, electrode connected to the through-hole electrode, and disposed on a back surface of the glass substrate with the cavity; and
an optical sensor element mounted on any one of the glass lid substrate and the glass substrate with the cavity.
2. An optical sensor device according to claim 1 , wherein the through-hole electrode has a divided-into-four shape and is disposed at a corner of the glass substrate with the cavity.
3. An optical sensor device according to claim 1 , wherein the through-hole has a divided-into-two shape and is disposed on each of two opposite edges.
4. An optical sensor device according to claim 1 , wherein the glass substrate with a cavity comprises light shielding glass.
5. An optical sensor device according to claim 1 , wherein the glass lid substrate has a filter function.
6. A method of manufacturing an optical sensor device, comprising:
forming a conductive film in a predetermined pattern on a glass substrate, the glass substrate having a plurality of cavities and a plurality of through-holes on a periphery of the plurality of cavities;
patterning the conductive film in a predetermined shape;
mounting an optical sensor element on the patterned conductive film;
bonding with an adhesive a glass lid substrate and the glass substrate together; and
cutting the glass substrate and the glass lid substrate which are bonded together, at locations dividing the plurality of through-holes.
7. A method of manufacturing an optical sensor device, comprising:
forming a conductive trim on one surface of a glass lid substrate;
patterning in a predetermined shape the conductive film formed on the glass lid substrate;
mounting an optical sensor element on the patterned conductive film;
forming the conductive film on a glass substrate, the glass substrate having a plurality of cavities and a plurality of through-holes on a periphery or the plurality of cavities;
patterning in a predetermined shape the conductive film formed on the glass substrate;
bonding the glass rid substrate and the glass substrate together with an adhesive having conductive particles added thereto; and
cutting the glass substrate and the glass lid substrate which are bonded together, at locations dividing the plurality of through-holes.