Hermetically joined ceramic assemblies and low temperature method for hermetically joining ceramic materials
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
1. A method for the joining of ceramic materials, said method comprising the steps of:
placing an aluminum brazing element between an interface area of a first ceramic piece and an interface area of a second ceramic piece to create a joining pre-assembly, wherein said aluminum brazing element comprises 99% by weight or greater aluminum, said first and said second ceramic pieces comprising aluminum nitride;
placing the components of said joining pre-assembly into a process chamber;
removing oxygen from said process chamber; and
heating at least said aluminum brazing element of said joining pre-assembly to a first joining temperature of between 800 C and 1200 C, thereby joining said first ceramic piece to said second ceramic piece with a hermetically sealed aluminum joint wherein said aluminum has not diffused into said first ceramic piece or said second ceramic piece, and wherein the thickness of said joint is 0.004 inches, and wherein said joint joins between an aluminum nitride surface of said first ceramic piece and an aluminum nitride surface of said second ceramic piece.
2. The method of claim 1 further comprising the step of applying pressure between said first ceramic piece said second ceramic piece across said brazing element during said heating step.
3. The method of claim 1 wherein the step of removing oxygen from said process chamber comprises applying a pressure of lower than 1×10E-4 Torr to said process chamber.
4. The method of claim 1 wherein the step of removing oxygen from said process chamber comprises applying a pressure of lower than 1×10E-5 Torr to said process chamber.
5. The method of claim 1 wherein the step of removing oxygen from said process chamber comprises purging and re-filling the chamber with pure, dehydrated inert gas.
6. The method of claim 1 wherein the step of removing oxygen from said process chamber comprises purging and re-filling the chamber with purified hydrogen.
7. The method of claim 4 wherein the step of removing oxygen from said process chamber further comprises placing said joining pre-assembly in a zirconium inner chamber within said process chamber.
8. The method of claim 1 wherein said step of heating said joining pre-assembly to a first joining temperature comprises heating said joining pre-assembly for a duration of between 10 minutes and 2 hours.
9. The method of claim 1 wherein said step of heating said joining pre-assembly to a first joining temperature comprises heating said joining pre-assembly for a duration of between 30 minutes and 1 hour.
10. The method of claim 1 further comprising the steps of:
pre-metallizing the interface area of the first ceramic prior to completing the joining pre-assembly; and
pre-metallizing the interface area of the second ceramic prior to completing the joining pre-assembly.
11. The method of claim 3 further comprising the steps of:
pre-metallizing the interface area of the first ceramic prior to completing the joining pre-assembly; and
pre-metallizing the interface area of the second ceramic prior to completing the joining pre-assembly.
12. A method for the joining of ceramic materials, said method comprising the steps of:
placing an aluminum brazing element in a joint interface area between a first ceramic piece and a second ceramic piece to create a joining pre-assembly, wherein said aluminum brazing element comprises 99% by weight or greater aluminum, said first and said second ceramic pieces comprising aluminum nitride;
placing the components of said joining pre-assembly in a process chamber; and
heating at least said aluminum brazing element of said joining pre-assembly to a first joining temperature of between 800 C and 1200 C, thereby joining said first ceramic piece to said second ceramic piece with an aluminum joint while maintaining a minimum joint thickness of a first thickness, wherein the thickness of said joint is maintained during said heating to be greater than or equal to said first thickness, said first thickness being greater than zero, wherein said brazing element prior to brazing is of a second thickness greater than said first thickness, wherein said aluminum has not diffused into said first ceramic piece or said second ceramic piece, and wherein said joint joins between an aluminum nitride surface of said first ceramic piece and an aluminum nitride surface of said second ceramic piece.
13. The method of claim 12 further comprising the step of removing oxygen from said process chamber.
14. The method of claim 13 wherein the step of removing oxygen from said process chamber comprises applying a pressure of lower than 5×10E-5 Torr to said process chamber.
15. The method of claim 13 wherein the step of removing oxygen from said process chamber comprises applying a pressure of lower than 1×10E-4 Torr to said process chamber.
16. The method of claim 13 wherein the step of removing oxygen from said process chamber comprises purging and re-filling the chamber with pure, dehydrated inert gas.
17. The method of claim 13 wherein the step of removing oxygen from said process chamber comprises purging and re-filling the chamber with purified hydrogen.
18. The method of claim 13 wherein said step of heating said joining pre-assembly to a first joining temperature comprises heating said joining pre-assembly for a duration of between 10 minutes and 4 hours.
19. The method of claim 13 wherein said step of heating said joining pre-assembly to a first joining temperature comprises heating said joining pre-assembly for a duration of between 25 minutes and 1 hour.