Thin-film semiconductor device for display apparatus, method for manufacturing thin-film semiconductor device for display apparatus, EL display panel, and EL display apparatus
View Patent ↗A thin-film semiconductor device for a display apparatus according to the present disclosure includes: a gate electrode above a substrate; a gate insulating film above the gate electrode; a semiconductor layer on the gate insulating film; a first electrode above the semiconductor layer; a second electrode in a same layer as the first electrode; an interlayer insulating film covering the first electrode and the second electrode; a gate line above the interlayer insulating film; and a power supply line in a same layer as the gate line and adjacent to the gate line. Furthermore, the gate electrode and the gate line are electrically connected via a first conductive portion, and the second electrode and the power supply line are electrically connected via a second conductive portion.
1. A thin-film semiconductor device for a display apparatus, the thin-film semiconductor device comprising:
a substrate;
a gate electrode above the substrate;
a gate insulating film above the substrate to cover the gate electrode;
a semiconductor layer on the gate insulating film;
a first electrode above the semiconductor layer;
a second electrode in a same layer as the first electrode;
an interlayer insulating film above the gate insulating film to cover the first electrode and the second electrode;
a gate line above the interlayer insulating film in a layer different from a layer including the gate electrode; and
a power supply line in a same layer as the gate line and adjacent to the gate line,
wherein the gate electrode and the gate line are electrically connected via a first conductive portion passing through the gate insulating film and the interlayer insulating film, a longest side of the power supply line extends in parallel with a longest side of the gate line,
the power supply line and one of the first electrode and the second electrode are electrically connected via a second conductive portion passing through the interlayer insulating film,
the power supply line supplies power to the first electrode or the second electrode,
a width of the power supply line corresponds to a width of a gap between two adjacent gate lines, and
the power supply line is arranged near the two adjacent gate lines to fill the gap between the two adjacent gate lines.
2. The thin-film semiconductor device for a display apparatus according to claim 1 ,
wherein a distance from the power supply line to the two adjacent gate lines is greater than or equal to 4 μm.
3. The thin-film semiconductor device for a display apparatus according to claim 1 ,
wherein the power supply line has a uniform thickness, and is formed along a shape of a surface of a layer that is under the power supply line.
4. The thin-film semiconductor device for a display apparatus according to claim 1 ,
wherein the semiconductor layer is an N-channel semiconductor layer, and
at least part of the power supply line is arranged not to overlap the semiconductor layer.
5. The thin-film semiconductor device for a display apparatus according to claim 1 ,
wherein the semiconductor layer is a P-channel semiconductor layer, and
at least part of the power supply line is arranged to overlap the semiconductor layer.
6. The thin-film semiconductor device for a display apparatus according to claim 1 ,
wherein the first electrode is a source electrode, and
the second electrode is a drain electrode.
7. The thin-film semiconductor device for a display apparatus according to claim 1 ,
wherein the first electrode is a drain electrode, and
the second electrode is a source electrode.
8. The thin-film semiconductor device for a display apparatus according to claim 1 ,
wherein the semiconductor layer comprises a polycrystalline semiconductor layer.
9. The thin-film semiconductor device for a display apparatus according to claim 1 ,
wherein the power supply line comprises one element selected from among Al, Cu, and Ag.
10. The thin-film semiconductor device for a display apparatus according to claim 9 ,
wherein the power supply line is a multilayered line.
11. An electro-luminescence display panel comprising:
a thin-film semiconductor array device for a display apparatus including a plurality of the thin-film semiconductor devices for display apparatus according to claim 1 each of which is arranged for a pixel;
a plurality of lower electrodes each of which is arranged above the thin-film semiconductor array device for display apparatus for the pixel;
conductive portions each of which electrically connects the thin-film semiconductor array device for display apparatus and one of the lower electrodes;
a light-emitting layer above the lower electrodes; and
an upper electrode above the light-emitting layer.
12. The electro-luminescence display panel according to claim 11 , further comprising
a bank above the thin-film semiconductor array device for display apparatus, the bank having a plurality of openings,
wherein the openings are formed corresponding to the lower electrodes.
13. The electro-luminescence display panel according to claim 11 ,
wherein the light-emitting layer is an organic light-emitting layer.
14. An electro-luminescence display apparatus comprising:
the electro-luminescence display panel according to claim 11 .
15. The thin-film semiconductor device for a display apparatus according to claim 1 ,
wherein the power supply line linearly extends across a plurality of pixels.