Methods of forming a high efficiency solar cell with a localized back surface field

1. A method of forming a high efficiency solar cell, comprising steps of:

(a) providing a doped silicon substrate, the substrate comprising a front surface and a rear surface;

(b) depositing an ink on the rear surface in a pattern, the ink comprising a p-type dopant and a solvent;

(c) heating the silicon substrate in a baking ambient to a first temperature and for a first time period in order to remove residual solvent from the deposited ink;

(d) heating the silicon substrate in a diffusion ambient to a second temperature and for a second time period in order to diffuse the p-type dopant into the rear surface to form a rear p+ diffusion area on the rear surface;

(e) exposing the silicon substrate to a phosphorous deposition ambient at a third temperature for a third time period, wherein a front PSG layer and a front phosphorous diffusion layer are formed on the front surface, and wherein a rear PSG layer and a rear phosphorous diffusion layer are formed on the rear surface;

(f) exposing the silicon substrate to an etchant for a third time period, wherein the front PSG layer is removed, and wherein the rear PSG layer is removed;

(g) depositing a front anti-reflective layer on the front surface and a rear passivation layer on the rear surface; and

(h) forming a front metal electrode on the front surface in ohmic contact with the front phosphorous diffusion layer through the front anti-reflective layer and a rear metal electrode on the rear surface through the rear passivation layer, the rear metal electrode being formed on the rear p+ diffusion area on the rear surface.

2. A method of forming a high efficiency solar cell according to claim 1 , further comprising a step of removing the rear phosphorous diffusion layer, wherein a silicon in a part of the rear phosphorous diffusion layer where the ink was not deposited is selectively removed for between 0.05 and 5 μm.

3. A method of forming a high efficiency solar cell according to claim 1 , wherein the rear surface is covered during the step (d) to prevent the rear surface from being exposed to the phosphorous deposition ambient.

4. A method of forming a high efficiency solar cell according to claim 1 , wherein the step (e) is applied prior to the step (d).

5. A method of forming a high efficiency solar cell according to claim 1 , wherein a pre-diffusion cleaning step is applied after step (c).

6. A method of forming a high efficiency solar cell according to claim 1 , further comprising a step of depositing an ink comprising silicon nanoparticles dispersed in a solvent on the front surface in a pattern prior to the step (e).

7. A method of forming a high efficiency solar cell according to claim 1 , wherein the p-type dopant is a boron-containing material.

8. A method of forming a high efficiency solar cell according to claim 7 , wherein the boron-containing material is selected from the group consisting of boron (B), boron nitride (BN), boron oxide (B 2 O 3 ), boric acid (B(OH) 3 ), boron carbide (B 4 C), boron silicide (B 2 Si, B 3 Si, B 4 Si, B 6 Si), boron-doped group TV nanoparticles, aluminum boride (AlB 2 ), barium boride (BaB 6 ), calcium boride (CaB 6 ), cerium boride (CeB 6 ), chromium boride (CrB), cobalt boride (Co 2 B—Co 3 B), dysprosium boride (DyB 4 , DyB 6 ), erbium boride (ErB 4 ), europium boride (EuB 6 ), gadolinium boride (GdB 6 ), hafnium boride (HfB 2 ), holmium boride (HoB 4 ), iron boride (Fe 2 B), lanthanum boride (LaB 6 ), lutetium boride (LuB 4 ), magnesium boride (MgB 2 ), manganese boride (MnB, MnB 2 ), molybdenum boride (MoB), neodymium boride (NdB 6 ), nickel boride (NiB), niobium boride (NbB 2 ), praseodymium boride (PrB 6 ), rhenium boride (Re 7 B 3 ), samarium boride (SmB 6 ), scandium boride (ScB 2 ), strontium boride (SrB 6 ), tantalum boride (TaB 2 ), terbium boride (TbB 6 ), thulium boride (TmB 4 ), titanium boride (TiB 2 ), tungsten boride (WB, W 2 B, W 2 B 5 ), vanadium boride (VB 2 ), ytterbium boride (YbB 6 ), and zirconium boride (ZrB 2 , ZrB 12 ).

9. A method of forming a high efficiency solar cell according to claim 1 , wherein the ink further comprises a ceramic particle and a polymer binder, and wherein the p-type dopant and the ceramic particle are dispersed in the solvent.

10. A method of forming a high efficiency solar cell according to claim 9 , wherein the ceramic particle is selected from the group consisting of SiN, SiO 2 , SiC, TiO 2 , Al 2 O 3 , MgO, CaO, Li 2 O, BeO, SrO, Sc 2 O 3 , Y 2 O 3 , La 2 O 3 , CeO 2 , Ce 2 O 3 , Pr 2 O 3 , Nd 2 O 3 , Sm 2 O 3 , EuO, Gd 2 O 3 , Ta 2 O 5 , Tb 2 O 3 , Dy 2 O 3 , HO 2 O 3 , Er 2 O 3 , Tm 2 O 3 , Yb 2 O 3 , Lu 2 O 3 , ThO 2 , UO 2 , ZrO 2 , and HfO 2 .

11. A method of forming a high efficiency solar cell according to claim 9 , wherein the p-type dopant is between 0.5 and 20 wt %, the ceramic particle is between 3 and 50 wt %, the polymer binder is between 0.5 and 3 wt %, based on the total weight of the ink.

12. A method of forming a high efficiency solar cell according to claim 11 , wherein the p-type dopant is between 1 and 10 wt %, the ceramic particle is between 5 and 30 wt %, the polymer binder is between 0.75 and 2 wt %, based on the total weight of the ink.

13. A method of forming a high efficiency solar cell according to claim 1 , wherein the anti-reflective layer and the rear passivation layer comprise SiNx.

14. A method of forming a high efficiency solar cell according to claim 1 , wherein the second temperature is between 875° C. and 950° C., and the ambient is nitrogen, oxygen, or mixture thereof.

15. A method of forming a high efficiency solar cell according to claim 1 , wherein the second time is between 20 minutes and 60 minutes.

16. A method of forming a high efficiency solar cell according to claim 1 , wherein the silicon substrate is doped with boron atoms.