Composite sensor and electronic device
View Patent ↗A composite sensor includes: a package including a container and a lid; a plurality of spaces that is partitioned by at least the container and the lid, and has different pressures, the plurality of the spaces including a first space sealed at around an atmospheric pressure and a second space sealed at a depressurized state; an acceleration sensor element disposed in the first space; and a vibration type angular velocity sensor element disposed in the second space. In the sensor, the first space has a volume smaller than a volume of the second space.
1. A composite sensor, comprising:
a package including a first space having a first pressure, the package including a second space having a second pressure lower than the first pressure, and the package including a container and a lid;
an acceleration sensor element disposed in the first space; and
a angular velocity sensor element disposed in the second space,
wherein the first space has a volume smaller than a volume of the second space, the first space and the second space is partitioned by the container and the lid, and
wherein the container has a bottom and a side wall that continuously rises from the bottom toward the lid, a first thickness of an outermost area of the side wall is thicker than a second thickness of an innermost area of the side wall, and the lid is placed on a top surface of the innermost area of the side wall.
2. The composite sensor according to claim 1 , wherein at least one of the container and the lid has a protruded section, the acceleration sensor is disposed overlap the protruded section in planar view.
3. The composite sensor according to claim 1 , wherein at least one of the container and the lid has a recessed section, the acceleration sensor is disposed within the recessed section.
4. The composite sensor according to claim 1 , wherein at least one of a wall forming the first space and a wall forming the second space has a through hole, the through hole is sealed by a sealing member.
5. The composite sensor according to claim 1 , wherein a height of a bottom surface forming the first space and a height of a bottom surface forming the second space are different from each other.
6. The composite sensor according to claim 1 , wherein at least one of the container and the lid has a layered structure.
7. An electronic device comprising the composite sensor according to claim 1 .