Process for providing a magnetic recording transducer having a smooth magnetic seed layer
View Patent ↗A method for providing a magnetic recording transducer is provided. The method includes providing a substrate, and a magnetic shield having a top surface above the substrate. The top surface is treated by a first plasma treatment performed at a first power. An amorphous ferromagnetic (FM) layer is deposited on and in contact with the top surface to a thickness of at least 5 Angstroms and not more than 50 Angstroms. A second plasma treatment is performed at a second power. A magnetic seed layer is provided on and contact with the amorphous FM layer. The magnetic seed layer may comprise a bilayer. A nonmagnetic spacer layer is provided above the magnetic seed layer, an antiferromagnetic (AFM) layer provided above the spacer layer, and a read sensor provided above the AFM layer.
1. A method for providing a magnetic recording transducer having a magnetic seed layer comprising:
providing a substrate;
providing a magnetic shield having a first top surface above the substrate;
treating the first top surface by a first plasma treatment performed at a first power;
depositing an amorphous ferromagnetic (FM) layer on and in contact with the first top surface, the amorphous FM layer deposited to a thickness of at least 5 Angstroms and not more than 50 Angstroms;
reducing the thickness of the amorphous FM layer by a second plasma treatment performed at a second power;
providing a magnetic seed sublayer on and in contact with the amorphous FM layer, the magnetic seed layer including the amorphous FM layer and the magnetic seed sublayer;
providing a nonmagnetic spacer layer above the magnetic seed sublayer;
providing an antiferromagnetic (AFM) layer above the spacer layer; and
providing a plurality of layers including a pinned layer, a reference layer, a barrier layer and a free layer of a read sensor above the AFM layer.
2. The method of claim 1 wherein the first power is from about 30 Watts to about 100 Watts.
3. The method of claim 1 wherein the second power is from about 30 Watts to about 50 Watts.
4. The method of claim 1 wherein the second plasma treatment reduces the thickness of the amorphous FM layer to a thickness of at least 5 Angstroms and not more than 20 Angstroms.
5. The method of claim 1 wherein the nonmagnetic spacer layer is deposited to a final thickness of at least 2.0 Angstroms and not more than 4.0 Angstroms prior to depositing the AFM layer.
6. The method of claim 1 wherein the second plasma treatment reduces the thickness of the amorphous FM layer to a thickness of at least 5 Angstroms and not more than 20 Angstroms, and the nonmagnetic spacer is deposited to a final thickness of at least 2.0 Angstroms and not more than 4.0 Angstroms.
7. The method of claim 6 wherein the nonmagnetic spacer is deposited to a final thickness of at least 3.4 Angstroms and not more than 4.0 Angstroms.
8. The method of claim 1 wherein the amorphous FM layer comprises at least one of CoFeB, NiCoFeB, and NiFeB, wherein B comprises from about 18 atomic percent (at. %) to about 22 at. %.
9. The method of claim 1 wherein the magnetic seed sublayer is a bilayer including a first sub layer, the first sub layer on and in contact with the amorphous FM layer, and a second sub layer that is on and in contact with the first sub layer, wherein:
the first sub layer comprises Ni 1-x Fe x , where x is at least 0.45 and not more than 0.55 and the second sub layer comprises Ni 1-y Fe y where y is at least 0.05 and not more than 0.15.
10. The method of claim 1 wherein the nonmagnetic spacer layer comprises at least one of Ru, Ti, and Ta.