Wafer level testing of optical devices
View Patent ↗A wafer includes multiple optical devices that each includes one or more optical components. The optical components include light-generating components that each generates a light signal in response to application of electrical energy to the light-generating component from electronics that are external to the wafer. The optical components also include receiver components that each outputs an electrical signal in response to receipt of light. The wafer also includes testing waveguides that each extends from within a boundary of one of the optical devices across the boundary of the optical device and also provides optical communication between a first portion of the optical components and a second portion of the optical components. The first portion of the optical components includes one or more of the light-generating components and the second portion of the optical components include one or more of the receiver components.
1. A system, comprising:
a plurality of optical devices on a wafer,
the optical devices including optical components,
the optical components include light-generating components that are each configured to generate a light signal in response to application of electrical energy to the light-generating component from electronics that are external to the wafer, and
the optical components include receiver components that are each configured to output an electrical signal that is a function of light received by the receiver component; and
testing waveguides on the wafer, each testing waveguide provides optical communication between a first portion of the optical components and a second portion of the optical components,
the first portion of the optical components includes one or more of the light-generating components and the second portion of the optical components includes one or more of the receiver components, and
each testing waveguides extends from within a boundary of one of the optical devices across the boundary of the optical device.
2. The system of claim 1 , wherein the first portion of the optical components and the second portion of the optical components to which each testing waveguide provides optical communication is located on the same device.
3. The system of claim 1 , wherein the first portion of the optical components and the second portion of the optical components to which each testing waveguide provides optical communication are located on different devices.
4. The system of claim 1 , wherein each of the devices on the wafer is the same.
5. The system of claim 1 , wherein each of the devices on the wafer is not the same.
6. The system of claim 1 , wherein the first portion of components and/or the second portion of components includes passive optical components.
7. The system of claim 6 , wherein the passive components include one or more components selected from a group consisting of multiplexer, demultiplexer, and splitter.
8. The system of claim 1 , wherein the first portion of components and/or the second portion of components includes active optical components in addition to the one or more light-generating components and the one or more receiver components.
9. The system of claim 8 , wherein the active optical components include a modulator.
10. The system of claim 1 , wherein each device is a transceiver.
11. A method, comprising:
generating a wafer that include optical devices on a wafer,
the optical devices including optical components,
the optical components including light-generating components that each can generate a light signal in response to application of electrical energy to the light-generating component device from electronics that are external to the wafer; and
the optical components including receiver components that are each configured to output an electrical signal that is a function of light received by the receiver component, and
testing waveguides on the wafer, each testing waveguide provides optical communication between a first portion of the optical components and a second portion of the optical components,
the first portion of the optical components including one or more light-generating components and the second portion of the optical components including one or more receiver components, and
each testing waveguides extends from within a boundary of one of the optical devices across the boundary of the optical device;
testing the devices for performance; and
separating the devices from the wafer after testing the devices for performance.
12. The method of claim 11 , wherein the light-generating components include lasers and the one or more receiver components each including a light sensor, and wherein
testing the devices includes driving an electrical current through one of the lasers,
measuring a second electrical current through one of the light sensors that is configured to receive light from the laser through which the electrical current is driven, and
comparing the measured current to a threshold.
13. The method of claim 11 , wherein the first portion of the optical components and the second portion of the optical components to which each testing waveguide provides optical communication is located on the same device.
14. The method of claim 11 , wherein the first portion of the optical components and the second portion of the optical components to which each testing waveguide provides optical communication are located on different devices.
15. The method of claim 11 , wherein each of the devices on the wafer is the same.
16. The method of claim 11 , wherein each of the devices on the wafer is not the same.
17. The method of claim 11 , wherein the first portion of components and/or the second portion of components includes passive optical components.
18. The method of claim 17 , wherein the passive components include one or more components selected from a group consisting of multiplexer, demultiplexer, and splitter.
19. The method of claim 11 , wherein the first portion of components and/or the second portion of components includes active optical components in addition to the one or more light-generating components and the one or more receiver components.
20. The method of claim 19 , wherein the active optical components include a modulator.