Electronic component and method for producing same
This electronic component is provided with an inorganic substrate, a conductor film formed on a surface of the substrate, and bonding wires bonded to a part of said conductor film, and wire bonding sections are formed on at least a part of the electronic component. The part of the conductor film at least forming the aforementioned wire bonding sections contains an Ag-based metal formed of Ag or an alloy having Ag as the main constituent and a metal oxide which coats said Ag-based metal and which has, as a constituent element, any of the elements selected from the group consisting of Al, Zr, Ti, Y, Ca, Mg, and Zn. The coating quantity of the metal oxide is a quantity corresponding to 0.02 to 0.1 parts by mass relative to 100 parts by mass of the aforementioned Ag-based metal.
1. An electronic component comprising:
an inorganic substrate;
a wet plating-less conductor film formed on a surface of said substrate, at least a part of the conductor film having wire bonding sections; and
bonding wires directly bonded to the wire bonding sections within at least a part of the conductor film;
wherein:
the wire bonding sections contain:
an Ag-based metal formed of Ag or an alloy having Ag as a main constituent; and
a metal oxide coating said Ag-based metal and having, as a constituent element, any of the elements selected from the group consisting of Al, Zr, Ti, Y, Ca, Mg, and Zn; and
the metal oxide that coats the Ag-based metal is present in an amount in a range of from 0.02 to 0.1 parts by mass relative to 100 parts by mass of the Ag-based metal.
2. The electronic component according to claim 1 , wherein the wire bonding sections within at least a part of the conductor film further contains an inorganic oxide and/or an oxide glass as an additive.
3. The electronic component according to claim 2 , wherein:
the inorganic substrate is a crystalline ceramic substrate, and
the wire bonding sections within at least a part of the conductor film contain an inorganic oxide as the additive.
4. The electronic component according to claim 2 , wherein:
the inorganic substrate is a non-crystalline ceramic substrate having a glass component as a main constituent, and
the wire bonding sections within at least a part of the conductor film contain an oxide glass as the additive.
5. The electronic component according to claim 3 , wherein the inorganic oxide is a mixture of bismuth oxide and copper oxide, and said mixture is present in an amount in a range of from 0.5 to 5 parts by mass relative to 100 parts by mass of the Ag-based metal.
6. The electronic component according to claim 4 , wherein the oxide glass is present in an amount in a range of from 0.05 to 0.5 parts by mass relative to 100 parts by mass of the Ag-based metal.
7. The electronic component according to claim 1 , wherein the bonding wires are made from a metal having any metallic element selected from the group consisting of gold, aluminum, and copper as a main constituent element.
8. A wire bonding section-forming conductor paste comprising:
an Ag-based metal powder having an average particle diameter of 0.3 to 6.0 μm and formed of Ag or an alloy having Ag as a main constituent; and
an organic metal compound or a metal oxide coating a surface of said Ag-based metal powder and having, as a constituent element, any of the elements selected from the group consisting of Al, Zr, Ti, Y, Ca, Mg, and Zn,
wherein:
the wire bonding section-forming conductor paste is configured to form a conductor film on a surface of an inorganic substrate in which at least a part of the conductor film contains wire bonding sections to which bonding wires are directly bonded for an electronic component; and
the organic metal compound or the metal oxide that coats the Ag-based metal is present in an amount in a range of from 0.02 to 0.1 parts by mass, in terms of metal oxide, relative to 100 parts by mass of the Ag-based metal powder.
9. The conductor paste according to claim 8 , further containing an inorganic oxide powder and/or an oxide glass powder as an additive.
10. The conductor paste according to claim 9 , further containing an inorganic oxide powder and/or an oxide glass powder as an additive when an average particle diameter of the Ag-based metal powder is a diameter in a range of from 3.0 to 6.0 μm.
11. The conductor paste according to claim 9 , wherein:
the inorganic oxide powder is a mixture of bismuth oxide and copper oxide, and
said mixture is present in an amount in a range of from 0.5 to 5 parts by mass relative to 100 parts by mass of the Ag-based metal powder.
12. The conductor paste according to claim 9 , wherein the oxide glass powder is present in an amount in a range of from 0.05 to 0.5 parts by mass relative to 100 parts by mass of the Ag-based metal powder.
13. A method for producing an electronic component that comprises an inorganic substrate, a wet plating-less conductor film formed on a surface of said substrate, and bonding wires, the method comprising:
(1) preparing a wire bonding section-forming conductor paste comprising:
an Ag-based metal powder formed of Ag or an alloy having Ag as a main constituent and having an average particle diameter of 0.3 to 6.0 μm; and
an organic metal compound or a metal oxide coating a surface of the Ag-based metal powder and having, as a constituent element, any of the elements selected from the group consisting of Al, Zr, Ti, Y, Ca, Mg, and Zn; and
(2) coating the conductor paste on the surface of the inorganic substrate to form a conductor film on the surface of said inorganic substrate, at least a part of the formed conductor film containing wire bonding sections; and
(3) bonding the bonding wires directly to the wire bonding sections within at least a part of the formed conductor film;
wherein:
the organic metal compound or the metal oxide that coats the Ag-based metal powder is present in an amount in a range of from 0.02 to 0.1 parts by mass, in terms of metal oxide, relative to 100 parts by mass of the Ag-based metal powder; and
a surface of the conductor film is not subjected to wet plating.
14. The method according to claim 13 , wherein the conductor paste further contains an inorganic oxide powder and/or an oxide glass powder as an additive.
15. The method according to claim 14 , wherein the conductor paste further contains an inorganic oxide powder and/or an oxide glass powder as an additive when the average particle diameter of the Ag-based metal powder is a diameter in a range of from 3.0 to 6.0 μm.
16. The method according to claim 15 , wherein the inorganic substrate is a crystalline ceramic substrate and the conductor paste further contains an inorganic oxide powder as the additive.
17. The method according to claim 15 , wherein
the inorganic substrate is a non-crystalline ceramic substrate having a glass component as the main constituent, and
the conductor paste further contains an oxide glass powder as the additive.
18. The method according to claim 14 , wherein the inorganic oxide powder is a mixture of bismuth oxide and copper oxide and said mixture is present in an amount in a range of from 0.5 to 5 parts by mass relative to 100 parts by mass of the Ag-based metal powder.
19. The method according to claim 14 , wherein the oxide glass powder is present in an amount in a range of from 0.05 to 0.5 parts by mass relative to 100 parts by mass of the Ag-based metal powder.
20. The electronic component according to claim 1 , further comprising:
a bonding pad formed on the inorganic substrate;
wherein the bonding wires are directly bonded to the wire bonding sections within at least a part of the conductor film and the bonding pad.
21. The method according to claim 13 , wherein:
the electronic component further comprises a bonding pad formed on the inorganic substrate; and
the bonding wires are directly bonded to the wire bonding sections within at least a part of the conductor film and the bonding pad.
22. The conductor paste according to claim 8 , wherein the Ag-based metal powder has an average particle diameter in a range of from 2.0 to 6.0 μm.