Method for manufacturing a microfluidic chip, and related chip and plate
View Patent ↗The invention relates to a method for manufacturing a microfluidic chip, wherein said method comprises the steps of: providing a plate combined with a layer of inorganic silica gel of formula: (HsiO 3/2 ) 2n where n is an integer, and providing a lid; chemically activating the layer of silica gel and the lid, in order to make the layer of gel and the lid hydrophilic; mechanically combining the layer of gel and the lid to form a chip, such that the layer of gel forms an intermediate layer between the plate and the lid; annealing the chip, such that the layer of silica gel transforms into an intermediate layer made up of a SiO 2 matrix for rigidly securing the plate to the lid. The invention also relates to a related chip and plate.
1. A production process for a microfluidic chip, wherein it comprises the steps of:
providing a glass plate connected to a layer of gel of inorganic silica of formula:
(HSiO 3/2 )2 n
where n is a natural whole number greater than or equal to 1, and providing a glass cap;
chemical activation of the layer of silica gel and of the cap to make the layer of gel and the cap hydrophilic;
mechanical association of the layer of gel and of the cap to form a chip such that the layer of gel forms an intermediate layer between the plate and the cap;
annealing of the chip such that the layer of silica gel is transformed into an intermediate layer formed by an Si0 2 connecting matrix of the plate and of the cap.
2. The process as claimed in claim 1 , in which the maximal annealing temperature Tr of the chip is such that:
20° C.< Tr <Min(Tv plate ,Tv cap )
where Min is the minimum mathematical operator, and
Tv plate and Tv cap are respectively the vitreous transition temperature of the plate and the vitreous transition temperature of the cap.
3. The process as claimed in claim 2 , in which the maximal annealing temperature Tr of the chip is such that:
100° C.≦ Tr ≦450° C.
4. The process as claimed claim 2 , in which the annealing temperature evolves during the annealing step from 20° C. to Tr at a speed of a few degrees Celsius per minute to allow transformation without cracking of the silica gel in the SiO 2 matrix.
5. The process as claimed in claim 1 , in which
the chemical activation step of the layer of silica gel is conducted due to Air/O 2 plasma; and
the chemical activation step of the cap is conducted due to a bath of ammonia or sulphuric acid, to allow the formation of chemical —OH groups at the surface of the gel and of the cap.
6. The process as claimed in claim 1 , comprising a step of:
formation of at least one microfluidic channel in the cap; and/or
formation of at least one circuit in the cap; and/or
association of at least one circuit on the cap due to a stratum of chemically activated silica gel, prior to the mechanical association step of the gel and of the cap.
7. A microfluidic chip comprising
a glass plate,
a glass cap comprising at least one microfluidic channel, and an intermediate layer between the plate and the cap, formed by an inorganic SiO 2 matrix, the microfluidic chip being characterized in that the layer formed by an SiO 2 matrix is obtained by a process as claimed in claim 1 .
8. The chip as claimed in claim 7 , in which the layer is unique.
9. The chip as claimed in claim 7 , in which the layer has a thickness of between 100 nm and 10 μm, and preferably between 300 nm and 400 nm.
10. The chip as claimed in claim 7 , comprising
at least one circuit in the cap; and/or
at least one circuit on the cap, connected to the cap by an inorganic SiO 2 matrix.
11. A plate having a thickness of between 200 μm and 1 mm and being connected to a layer of gel of inorganic silica, having a thickness of between 100 nm and 10 μm to form a chip as claimed in claim 7 .