Gas dispersion disc assembly
View Patent ↗An apparatus includes a gas dispersal plate and an adapter structure. The gas dispersal plate has a plurality of gas dispersion orifices, wherein one or more of the gas dispersion orifices have a first portion with a first cross-section configured to allow entry of gas and a second portion having a second cross-section configured to allow exit of gas, the first cross-section being smaller than the second cross-section.
1. An apparatus, comprising:
a chamber head including a floor panel:
a gas dispersal plate having a plurality of gas dispersion orifices;
and an adapter in direct contact with the gas dispersal plate, the adapter positioned outside an area of the gas dispersal plate populated by the plurality of gas dispersion orifices, wherein
one or more of the gas dispersion orifices has a first portion with a first cross-section configured to allow entry of gas and a second portion having a second cross-section configured to allow exit of gas, the first cross-section being smaller than the second cross-section,
the adapter is embedded in an upper surface of the floor panel, wherein the adapter is formed separately from the floor panel,
and the gas dispersal plate is in communication with a lower surface of the floor panel in an operational state.
2. The apparatus of claim 1 , wherein the one or more gas dispersion orifices from the plurality of gas dispersion orifices are configured to disperse process gas in a substantially symmetrical fashion relative to a longitudinal axis of the one or more gas dispersion orifices.
3. The apparatus of claim 2 , wherein the one or more gas dispersion orifices from the plurality of gas dispersion orifices have a structure with a design selected from the designs consisting of:
a counter-sink design;
a counter-bore design;
a spherical (end mill) design; and
a tapered hole design.
4. The apparatus of claim 1 , wherein the one or more gas dispersion orifices from the plurality of gas dispersion orifices are configured to disperse process gas in a substantially directional fashion.
5. The apparatus of claim 4 , wherein the one or more gas dispersion orifices from the plurality of gas dispersion orifices have a structure with a design selected from the designs consisting of:
an off-centered counter-sink design;
an off-centered counter-bore design; and
an off-centered spherical (end mill) design.
6. The apparatus of claim 1 , wherein the one or more gas dispersion orifices from the plurality of gas dispersion orifices are configured such that a longitudinal axis of the one or more orifices are at an angle (8) of at least 2 degrees from perpendicular, as it relates to a lower surface of the gas dispersal plate.
7. The apparatus of claim 1 , wherein the angle (8) ranges from about 15 degrees to about 75 degrees.
8. The apparatus of claim 1 , wherein the adapter is fastened to the gas dispersal plate such that a portion of the circumferential edge of the adapter remains uncovered by the gas dispersal plate.
9. The apparatus of claim 8 , further comprising a chamber head having an enclosure, the enclosure having an opening configured to receive the circumferential portion.
10. The apparatus of claim 8 , wherein the adapter has a form of a ring and the circumferential edge is an annular portion of the ring.