Semiconductor devices including a guard ring and related semiconductor systems
Semiconductor devices are provided. The semiconductor devices may include a substrate and a transistor on the substrate. The semiconductor devices may include a first guard ring of first conductivity type in the substrate adjacent the transistor. The semiconductor devices may include a second guard ring of second conductivity type opposite the first conductivity type in the substrate adjacent the first guard ring. Related semiconductor systems are also provided.
1. A semiconductor device comprising:
a substrate;
a transistor on the substrate, the transistor comprising a gate electrode, a source electrode, and a drain electrode;
a first guard ring of first conductivity type in the substrate adjacent the transistor; and
a second guard ring of second conductivity type opposite the first conductivity type in the substrate adjacent the first guard ring,
wherein the first guard ring, the second guard ring, and at least one of the source electrode and the drain electrode are configured to receive an equivalent bias,
wherein a depth of the first guard ring is greater in the substrate than a depth of the second guard ring, and
wherein the second guard ring is configured to block movement of charges from the drain electrode such that the charges gather in the first guard ring.
2. The semiconductor device of claim 1 , wherein:
the first guard ring comprises a first well of the first conductivity type;
the second guard ring comprises a second well of the second conductivity type;
the semiconductor device further comprises a third guard ring comprising a third well of the first conductivity type;
the third guard ring is closer to the second guard ring than to the first guard ring;
the equivalent bias comprises a first bias; and
the third guard ring is configured to receive a second bias that is different from the first bias.
3. The semiconductor device of claim 2 , wherein the first bias comprises one of a ground voltage and a power voltage, and the second bias comprises the other one of the ground voltage and the power voltage.
4. The semiconductor device of claim 1 , wherein the first guard ring forms a perimeter around the transistor and the second guard ring forms a perimeter around the first guard ring.
5. The semiconductor device of claim 1 , wherein:
the substrate comprises a base substrate and an epi layer of different respective conductivity types; and
a portion of the first guard ring and a portion of the base substrate overlap each other.
6. The semiconductor device of claim 1 , further comprising:
a buried layer, of the second conductivity type, under the second guard ring in the substrate such that a portion of the second guard ring and a portion of the buried layer overlap each other.
7. The semiconductor device of claim 1 , wherein:
the transistor comprises an N-type lateral double diffused metal oxide semiconductor (LDMOS) transistor;
the equivalent bias comprises a ground voltage; and
the source electrode comprises first and second source electrodes on opposite sides of the drain electrode, respectively.
8. The semiconductor device of claim 7 , wherein the first guard ring is closer to the source electrode than to the drain electrode.
9. The semiconductor device of claim 1 , wherein:
the transistor comprises a P-type lateral double diffused metal oxide semiconductor (LDMOS) transistor;
the equivalent bias comprises a power voltage; and
the source electrode comprises first and second source electrodes on opposite sides of the drain electrode, respectively.
10. The semiconductor device of claim 9 , wherein the first guard ring is closer to the source electrode than to the drain electrode.
11. The semiconductor device of claim 1 , wherein:
the transistor comprises an N-type lateral double diffused metal oxide semiconductor (LDMOS) transistor;
the equivalent bias comprises a power voltage;
the drain electrode comprises first and second drain electrodes; and
the source electrode is between the first and second drain electrodes.
12. The semiconductor device of claim 11 , wherein the first guard ring is closer to the drain electrode than to the source electrode.
13. A semiconductor device comprising:
a first guard ring comprising a first well of first conductivity type, the first guard ring forming a perimeter around a transistor on a substrate and being configured to provide a first band potential level; and
a second guard ring comprising a second well of second conductivity type opposite the first conductivity type, the second guard ring forming a perimeter around the first guard ring and being configured to provide a second band potential level that is different from the first band potential level,
wherein the first and second guard rings are configured to receive an equivalent bias,
wherein the first and second guard rings are configured to simultaneously receive the equivalent bias, and
wherein the second well of the second guard ring has a more shallow depth in the substrate than a depth of the first well of the first guard ring in the substrate.