Granted Patent B1

US 8,980,109 · App. 13/711,160 · Granted Mar 17, 2015

Abstract

Claims (57)

1. A method for fabricating a magnetic writer having an air-bearing surface location (ABS location) corresponding to an air-bearing surface (ABS) and including a nonmagnetic layer, the method comprising:

providing a pole trench in the nonmagnetic layer, the pole trench having a pole tip region and a yoke region;

providing at least one pole material, the at least one pole material having an external protrusion above and external to the pole trench;

providing a hard mask, the hard mask covering at least the external protrusion;

removing a portion of the nonmagnetic layer adjacent to the pole trench to form a side shield trench;

providing at least one side shield material, a portion of the at least one side shield material being adjacent to the hard mask and filling at least a portion of the side shield trench; and

planarizing the at least one side shield material and the at least one pole material, thereby removing at least a portion of the external protrusion of the at least one pole material, removing a portion of the at least one side shield material and forming at least one side shield and a main pole.

2. The method of claim 1 wherein the step of providing the at least one main pole material further includes:

depositing at least one pole seed layer;

full film depositing the at least one pole layer;

providing a mask, the mask covering a portion of the at least one pole layer corresponding to the at least one pole material and exposing a remaining portion of the at least one pole layer; and

removing the remaining portion of the at least one pole layer.

3. The method of claim 1 wherein the step of providing the hard mask further includes:

full film depositing a hard mask layer;

providing a mask covering at a first portion of the hard mask layer corresponding to the hard mask and exposing a second portion of the hard mask layer; and

removing the second portion of the hard mask layer.

4. The method of claim 3 wherein the hard mask layer includes Ru.

5. The method of claim 1 wherein the step of removing the portion of the nonmagnetic layer further includes:

providing a mask covering the hard mask and exposing the portion of the nonmagnetic layer; and

wet etching the portion of the nonmagnetic layer.

6. The method of claim 1 wherein the step of providing the at least one side shield material further includes:

depositing at least one side shield seed layer;

providing a side shield mask exposing at least a portion of the side shield trench, the hard mask and the external protrusion;

depositing at least one side shield layer; and

removing the side shield mask, the at least one side shield material remaining.

7. The method of claim 1 wherein the step of planarizing the at least one side shield material and the at least one pole material further includes:

depositing a dielectric layer, the dielectric layer covering the at least one side shield material; and

chemical mechanical planarizing the at least one side shield material and the at least one pole material.

8. The method of claim 1 wherein the at least one side shield material includes NiFe.

9. The method of claim 1 wherein the at least one pole material includes CoFe.

10. The method of claim 1 further comprising:

providing a write gap, at least a portion of the write gap being on the pole; and

providing a trailing shield, at least a portion of the trailing shield being on the write gap.

11. The method of claim 1 wherein the step of providing the at least one side shield material further includes

providing a side shield mask exposing a portion of the magnetic transducer including the hard mask, the external protrusion of the pole material and the at least the portion of the side shield trench; and

depositing at least one side shield layer after the side shield mask is provided; the method further including

providing a write gap, at least a portion of the write gap being on the pole; and

providing a trailing shield, at least a portion of the trailing shield being on the write gap.

12. A method for fabricating a magnetic transducer having an air-bearing surface location (ABS location) corresponding to an air-bearing surface (ABS) and including a nonmagnetic layer, the method comprising:

providing a pole trench in the nonmagnetic layer, the pole trench having a pole tip region and a yoke region;

full film depositing a nonmagnetic seed layer, a portion of the at least one nonmagnetic seed layer residing in the pole trench;

full film depositing a pole layer, a first portion of the pole layer residing in and above the pole trench;

providing a pole mask, the pole mask covering at least the portion of the pole layer and exposing a remaining portion of the pole layer;

removing the remaining portion of the pole layer, the portion of the pole layer having an external protrusion above and external to the pole trench;

full film depositing a hard mask layer, a portion of the hard mask layer covering the external protrusion, the hard mask layer consisting of Ru;

providing a mask covering at least the portion of the hard mask layer;

removing an exposed portion of the hard mask layer to form a hard mask, the hard mask covering at least the external protrusion;

providing an etch mask covering the hard mask and exposing a portion of the nonmagnetic layer adjacent to the pole trench;

wet etching the portion of the nonmagnetic layer, thereby forming a side shield trench;

depositing a side shield seed layer;

providing a side shield mask exposing a portion of the magnetic transducer including the hard mask, the portion of the pole layer and at least a portion of the side shield trench;

depositing a side shield layer;

removing the side shield mask;

depositing an aluminum oxide layer on a remaining portion of the side shield layer;

planarizing the side shield layer and at least a portion of the external protrusion, forming at least one side shield and a main pole;

providing a write gap, at least a portion of the write gap being on the pole; and

providing a trailing shield, at least a portion of the trailing shield being on the write gap.

Assignments (9)