Semiconductor integrated circuit device having improved interconnect accuracy near cell boundaries
View Patent ↗A layout structure of a semiconductor integrated circuit is provided with which narrowing and breaking of metal interconnects near a cell boundary can be prevented without increasing the data amount and processing time for OPC. A cell A and a cell B are adjacent to each other along a cell boundary. The interconnect regions of metal interconnects from which to the cell boundary no other interconnect region exists are placed to be substantially axisymmetric with respect to the cell boundary, while sides of diffusion regions facing the cell boundary are asymmetric with respect to the cell boundary.
1. A semiconductor integrated circuit device comprising:
first and second standard cells that are different in cell structure from each other and placed adjacent to each other along a cell boundary extending in a first direction, wherein in the first and second standard cells,
metal interconnect regions, which extend in the first direction and wherein no other metal interconnect region exists between the metal interconnect regions and the cell boundary, said metal interconnect regions are asymmetric with respect to the cell boundary,
when a gap of a predetermined length or less is regarded as non-existent, the interconnect regions are substantially axisymmetric with respect to the cell boundary, and
the predetermined length is the length of a gap that can be substantially regarded as non-existent from the standpoint of the optical proximity effect.
2. The semiconductor integrated circuit device of claim 1 , wherein at least one of the metal interconnect regions is connected to a power supply line or a ground line.
3. The semiconductor integrated circuit device of claim 1 , wherein at least one of the metal interconnect regions is a dummy pattern.