Method for producing organic EL element, display device, light-emitting apparatus, and ultraviolet irradiation device
View Patent ↗A method of manufacturing an organic EL element operating at low voltage to emit light at high intensity comprises: a first step of forming, on an anode, a hole injection layer including metal oxide; a second step of irradiating the hole injection layer with ultraviolet light, the ultraviolet light having a wavelength greater than a wavelength at which oxygen molecules decompose and yield oxygen radicals; a third step of forming functional layers containing organic material on or above the hole injection layer after the second step, the functional layers including a light-emitting layer; and a fourth step of forming a cathode on or above the functional layers.
1. A method of manufacturing an organic EL element comprising:
a first step of forming, on an anode, a hole injection layer including metal oxide;
a second step of irradiating the hole injection layer with ultraviolet light, the ultraviolet light having a wavelength greater than a wavelength at which oxygen molecules decompose and yield oxygen radicals;
a third step of forming functional layers containing organic material on or above the hole injection layer after the second step, the functional layers including a light-emitting layer; and
a fourth step of forming a cathode on or above the functional layers.
2. The method of claim 1 , wherein
in the second step, the ultraviolet light has a wavelength greater than a wavelength at which ozone decomposes and yields oxygen radicals.
3. The method of claim 1 , wherein
in the second step, the ultraviolet light has a wavelength longer than 184.9 nm and not longer than 380 nm as a main range.
4. The method of claim 1 , wherein
in the second step, the ultraviolet light has a wavelength longer than 253.7 nm and not longer than 380 nm as a main range.
5. The method of claim 1 , wherein
the first step is performed in vacuum, and the second step is performed in the atmosphere.
6. The method of claim 1 , wherein
in the second step, the hole injection layer is irradiated with the ultraviolet light until a narrow-scan spectrum for an inner-shell orbital of an atom included as a main element in the metal oxide stabilizes in XPS measurement.
7. The method of claim 1 , wherein
in the first step, the metal oxide is tungsten oxide.
8. The method of claim 7 , wherein
in the second step, the ultraviolet light has a wavelength corresponding to an energy value equal to or greater than binding energy of a single bond between an oxygen atom in tungsten oxide and adsorbates to the oxygen atom, and smaller than binding energy between an oxygen atom and a tungsten atom in tungsten oxide.
9. The method of claim 8 , wherein
the adsorbates include at least one of carbon atom, hydrogen atom, oxygen atom and nitrogen atom.
10. The method of claim 1 , wherein
the metal oxide is tungsten oxide, and
in the second step, the hole injection layer is irradiated with the ultraviolet light until UPS spectrum stabilizes within the binding energy range from 4.5 eV to 5.4 eV.
11. The method of claim 1 , wherein
the metal oxide is molybdenum oxide, and
in the second step, the hole injection layer is irradiated with the ultraviolet light until UPS spectrum stabilizes within the binding energy range from 3.7 eV to 5.2 eV.
12. The method of claim 1 , wherein
in the second step, the hole injection layer is irradiated with the ultraviolet light until a narrow-scan spectrum for C1s of the hole injection layer stabilizes in XPS measurement.
13. The method of claim 1 , wherein
the metal oxide is tungsten oxide, and
in the second step, the hole injection layer is irradiated with the ultraviolet light until a narrow-scan spectrum for W4f of the hole injection layer stabilizes in XPS measurement.
14. The method of claim 1 , wherein
the metal oxide is molybdenum oxide, and
in the second step, the hole injection layer is irradiated with the ultraviolet light until a narrow-scan spectrum for Mo3d of the hole injection layer stabilizes in XPS measurement.
15. A display apparatus using an organic EL element manufactured by the method of claim 1 .
16. A light-emitting apparatus using an organic EL element manufactured by the method of claim 1 .
17. An ultraviolet irradiation apparatus irradiating ultraviolet light on an intermediate product of an organic EL element having a hole injection layer and functional layers layered between an anode and a cathode, the hole injection layer including metal oxide, the functional layers including organic material and having holes injected thereto from the hole injection layer, wherein
the ultraviolet light has a wavelength greater than a wavelength at which oxygen molecules decompose and yield oxygen radicals.
18. The ultraviolet irradiation apparatus of claim 17 , wherein
the ultraviolet light has a wavelength greater than a wavelength at which ozone decomposes and yields oxygen radicals.
19. The ultraviolet irradiation apparatus of claim 17 , wherein
the ultraviolet light has a wavelength longer than 184.9 nm and not longer than 380 nm as a main range.
20. The ultraviolet irradiation apparatus of claim 17 , wherein
the ultraviolet light has a wavelength longer than 253.7 nm and not longer than 380 nm as a main range.