Method for providing a monolithic shield for a magnetic recording transducer
View Patent ↗A method fabricates a magnetic transducer. A sacrificial leading shield is provided on an etch stop layer. A nonmagnetic layer is provided on the sacrificial leading shield. A pole trench is formed in the nonmagnetic layer and on the sacrificial leading shield. A pole is formed. The pole has a bottom and a top wider than the bottom in a pole tip region. Part of the pole in the pole tip region is in the pole trench and at the ABS location. The sacrificial leading shield and part of the nonmagnetic layer adjacent to the pole are removed. An air bridge thus resides in place of the sacrificial leading shield between the portion of the pole and the etch stop layer. As least one shield layer is provided. The at least one shield layer substantially fills the air bridge and form a monolithic shield including a leading and side shields.
1. A method for fabricating a magnetic transducer having an air-bearing surface location (ABS location) corresponding to an air-bearing surface (ABS), the method comprising:
providing an etch stop layer;
providing a sacrificial leading shield on the etch stop layer, the sacrificial leading shield having a beveled surface and including NiFe;
providing a nonmagnetic layer, a portion of the nonmagnetic layer on the sacrificial leading shield;
providing a pole trench in the nonmagnetic layer, the pole trench having a shape and location corresponding to the pole, the pole trench residing on the sacrificial leading shield;
forming a pole having a pole tip region, the pole having a bottom and a top wider than the bottom in the pole tip region, a portion of the pole in the pole tip region residing in the pole trench and at the ABS location;
removing a portion of the nonmagnetic layer adjacent to the pole and the sacrificial leading shield such that an air bridge resides in place of the sacrificial leading shield between the portion of the pole and the etch stop layer; and
providing at least one shield layer, the at least one shield layer substantially filling the air bridge and forming a monolithic shield including a leading shield and at least one side shield.
2. The method of claim 1 wherein the etch stop layer includes at least one of a Ta/Ru layer, a Pt/Ru layer, a Ti/Ru layer, and a Ti/NiCr layer.
3. The method of claim 2 wherein the step of providing the nonmagnetic layer includes:
providing a wet etch stop layer on at least the sacrificial leading shield; and
depositing an aluminum oxide layer.
4. The method of claim 3 wherein the step of providing the pole trench further comprising:
reactive ion etching the aluminum oxide layer.
5. The method of claim 1 wherein the step of providing the at least one shield further comprising:
depositing a side shield seed layer; and
plating the at least one shield.
6. The method of claim 5 wherein the side shield mask exposes a portion of a field region corresponding to at least one pad and at least one coil and wherein the shield seed layer further covers the portion of the field region.
7. The method of claim 5 wherein the side shield mask exposes a portion of a field region corresponding to at least one pad and at least one coil the method further comprising:
providing a conductive hard mask, the conductive hard mask covering the pole and the portion of the field region.
8. The method of claim 1 wherein the air bridge had a thickness of not more than one micron.
9. A method for fabricating a magnetic transducer having an air-bearing surface location (ABS location) corresponding to an air-bearing surface (ABS), the method comprising:
providing an etch stop layer;
providing a sacrificial leading shield on the etch stop layer;
providing a nonmagnetic layer, a portion of the nonmagnetic layer on the sacrificial leading shield;
providing a pole trench in the nonmagnetic layer, the pole trench having a shape and location corresponding to the pole, the pole trench residing on the sacrificial leading shield;
forming a pole having a pole tip region, the pole having a bottom and a top wider than the bottom in the pole tip region, a portion of the pole in the pole tip region residing in the pole trench and at the ABS location;
removing a portion of the nonmagnetic layer adjacent to the pole and the sacrificial leading shield such that an air bridge resides in place of the sacrificial leading shield between the portion of the pole and the etch stop layer, the step of removing the portion of the nonmagnetic layer and the sacrificial leading shield further comprising:
providing a side shield mask having an aperture therein, the aperture residing above the pole, the sacrificial leading shield, and the portion of the nonmagnetic layer; and
performing a wet etch; and
providing at least one shield layer, the at least one shield layer substantially filling the air bridge and forming a monolithic shield including a leading shield and at least one side shield.