Organic light-emitting element, display panel, display device, and manufacturing method for organic light-emitting element
View Patent ↗A planarization film is formed as a silicon oxide monolayer using, for instance, a spin coat method, through, for example, applying a silicon-containing organic solvent to an upper portion of a TFT layer and planarizing an upper surface of a resist film made up of a silicon-containing organic solvent, heating a predetermined processing fluid, e.g., peroxymonosulfuric acid, and discharging the processing fluid heated to, for example, 150° C., onto the planarized upper surface of the resist film such that organic components of the resist film are dissolved while silicon in the resist film is oxidized by the processing fluid.
1. An organic light-emitting element, comprising:
an organic electroluminescence layer including a pair of electrodes and an organic light-emitting layer disposed between the pair of electrodes;
a thin-film transistor layer formed below the organic electroluminescence layer, being electrically connected to one electrode of the pair of electrodes, and causing the organic electroluminescence layer to emit light; and
a planarization film disposed between the organic electroluminescence layer and the thin-film transistor layer, planarizing irregularities in an upper portion of the thin-film transistor layer such that the organic electroluminescence layer is formed over a planarised surface, wherein
the planarization film is made up of a silicon oxide monolayer, and
the planarization film made up of the silicon oxide monolayer is formed through:
using a predetermined liquid phase film formation method to apply a silicon-bearing organic solvent to the upper portion of the thin-film transistor layer and to planarize an upper surface of the silicon-bearing organic solvent, thus forming a silicon-bearing organic solvent film;
heating a predetermined solvent that includes a material having heat-increased oxidizing power to obtain a heated solvent; and
discharging the heated solvent onto the silicon-bearing organic solvent film having a planarised upper surface, wherein
the heated solvent dissolves organic components in the silicon-bearing organic solvent film while at least silicon in the silicon-bearing organic solvent film remains, and the silicon that remains undergoes liquid phase oxidation by the heated solvent.
2. The organic light-emitting element of claim 1 , wherein
the heating of the predetermined solvent is performed by combining a first solvent and a second solvent into a mixture, and then heating the mixture to a predetermined temperature.
3. The organic light-emitting element of claim 2 , wherein
heating the mixture to the predetermined temperature is performed by combining the first solvent and the second solvent in a common container and heating the common container.
4. The organic light-emitting element of claim 2 , wherein
heating the mixture to the predetermined temperature is performed by supplying the first solvent to a chemical combiner through a first supply line, supplying the second solvent to the chemical combiner through a second supply line, and combining the first solvent and the second solvent in the chemical combiner such that the mixture is heated through chemical reaction of the first solvent with the second solvent.
5. The organic light-emitting element of claim 4 , wherein
at least one of the first solvent and the second solvent is heated before the first solvent and the second solvent are combined in the chemical combiner.
6. The organic light-emitting element of claim 1 , wherein
the planarization film made up of the silicon oxide monolayer contains carbon atoms.
7. The organic light-emitting element of claim 1 , wherein
the silicon-bearing organic solvent has a silicon content of no less than 20 wt % and no more than 40 wt %.
8. The organic light-emitting element of claim 1 , wherein
the material having heat-increased oxidizing power included in the predetermined solvent is peroxymonosulfuric acid (H 2 SO 5 ).
9. The organic light-emitting element of claim 8 , wherein
the peroxymonosulfuric acid (H 2 SO 5 ) is produced by combining sulfuric acid and aqueous hydrogen peroxide.
10. The organic light-emitting element of claim 8 , wherein
the peroxymonosulfuric acid (H 2 SO 5 ) is produced by sulfuric acid electrolysis.
11. The organic light-emitting element of claim 8 , wherein
the heat is increased by raising a temperature to no less than 130° C. and no more than 160° C.
12. The organic light-emitting element of claim 1 , wherein
the upper portion of the thin-film transistor layer has a protective film of a silicon-based material formed thereon, and
the planarization film is formed over the protective silicon film.
13. The organic light-emitting element of claim 1 , wherein
the predetermined liquid phase film formation method is one of a spin coat method and a slit coat method.
14. A display panel, comprising
the organic light-emitting element of claim 1 .
15. A display device, comprising
the display panel of claim 14 .
16. An organic light-emitting device manufacturing method, comprising:
forming a thin-film transistor layer;
forming a planarization film planarizing irregularities in a top portion of the thin-film transistor layer; and
forming a pair of electrodes and an organic electroluminescence layer on a planarised upper surface of the planarization film, the organic electroluminescence layer including an organic light-emitting layer disposed between the pair of electrodes, and one electrode of the pair of electrodes being electrically connected to the thin-film transistor layer, wherein
the planarization film is made up of a silicon oxide monolayer, and
forming the planarization film made up of the silicon oxide monolayer involves:
using a predetermined liquid phase film formation method to apply a silicon-bearing organic solvent to the upper portion of the thin-film transistor layer and to planarize an upper surface of the silicon-bearing organic solvent, thus forming a silicon-bearing organic solvent film;
heating a predetermined solvent that includes a material having heat-increased oxidizing power to obtain a heated solvent; and
discharging the heated solvent onto the silicon-bearing organic solvent film having a planarised upper surface, wherein
the heated solvent dissolves organic components in the silicon-bearing organic solvent film while at least silicon in the silicon-bearing organic solvent film remains, and the silicon that remains undergoes liquid phase oxidation by the heated solvent.
17. The organic light-emitting element manufacturing method of claim 16 , wherein
the heating of the predetermined solvent is performed by combining a first solvent and a second solvent into a mixture, and then heating the mixture to a predetermined temperature.
18. The organic light-emitting element manufacturing method of claim 17 , wherein
heating the mixture to the predetermined temperature is performed by combining the first solvent and the second solvent in a common container and heating the common container.
19. The organic light-emitting element manufacturing method of claim 17 , wherein
heating the mixture to the predetermined temperature is performed by supplying the first solvent to a chemical combiner through a first supply line, supplying the second solvent to the chemical combiner through a second supply line, and combining the first solvent and the second solvent in the chemical combiner such that the mixture is heated through chemical reaction of the first solvent with the second solvent.
20. The organic light-emitting element manufacturing method of claim 19 , wherein
at least one of the first solvent and the second solvent is heated before the first solvent and the second solvent are combined in the chemical combiner.
21. The organic light-emitting element manufacturing method of claim 16 , wherein
the silicon-bearing organic solvent has a silicon content of no less than 20 wt % and no more than 40 wt %.
22. The organic light-emitting element manufacturing method of claim 16 , wherein
the material having heat-increased oxidizing power included in the predetermined solvent is peroxymonosulfuric acid (H 2 SO 5 ).
23. The organic light-emitting element manufacturing method of claim 22 , wherein
the peroxymonosulfuric acid (H 2 SO 5 ) is produced by combining sulfuric acid and aqueous hydrogen peroxide.
24. The organic light-emitting element manufacturing method of claim 22 , wherein
the peroxymonosulfuric acid (H 2 SO 5 ) is produced by sulfuric acid electrolysis.
25. The organic light-emitting element manufacturing method of claim 16 , wherein
the heat is increased by raising a temperature to no less than 130° C. and no more than 160° C.
26. The organic light-emitting device manufacturing method of claim 16 , further comprising additionally forming a protective film of a silicon-based material over the top portion of the thin-film transistor layer, performed between forming the thin-film transistor layer and forming the planarization film, wherein
the planarization film is formed over the protective silicon film.
27. The organic light-emitting element manufacturing method of claim 16 , wherein
the predetermined liquid phase film formation method is one of a spin coat method and a slit coat method.