Nonvolatile memory device and method for fabricating the same
View Patent ↗This technology relates to a nonvolatile memory device and a method for fabricating the same. The nonvolatile memory device may include a pipe connection gate electrode configured to have a lower part buried in a groove formed in a substrate, one or more pipe channel layers formed within the pipe connection gate electrode, pairs of main channel layers each coupled with the pipe channel layer and extended in a direction substantially perpendicular to the substrate; and a plurality of interlayer insulating layers and a plurality of cell gate electrodes alternately stacked along the main channel layers. In accordance with this technology, a lower part of the pipe connection gate electrode is buried in the substrate. Accordingly, electric resistance may be reduced because the pipe connection gate electrode may have an increased volume without a substantial increase of the height.
1. A nonvolatile memory device, comprising:
a pipe connection gate electrode configured to have a lower part buried in a groove formed in a substrate;
one or more pipe channel layers formed within the pipe connection gate electrode;
pairs of main channel layers each coupled with the pipe channel layer and extended in a direction substantially perpendicular to the substrate; and
a plurality of interlayer insulating layers and a plurality of cell gate electrodes alternately stacked along the main channel layers,
wherein the pipe connection gate electrode comprises a first conductive layer over the substrate, a second conductive layer over the first conductive layer, and a third conductive layer over the second conductive layer.
2. The nonvolatile memory device of claim 1 ,
wherein the first conductive layer protrudes toward the substrate, and
wherein the pipe channel layers are farmed within the second conductive layer.
3. The nonvolatile memory device of claim 1 , wherein the pipe connection gate electrode is separated by a block.
4. The nonvolatile memory device of claim 1 , further comprising an insulating layer interposed between the pipe channel layers and the pipe connection gate electrode.
5. The nonvolatile memory device of claim 1 , further comprising a memory layer interposed between each of the main channel layers and the cell gate electrodes.
6. The nonvolatile memory device of claim 1 , further comprising isolation insulating layers interposed between the substrate and the pipe connection gate electrode.