Chemical vapor deposition of fluorocarbon polymers
View Patent ↗Provided is a method for forming a fluorocarbon polymer on a surface of a structure. A feedstock gas is directed through a porous heat member having a temperature sufficient to crack the feedstock gas and produce a reactive species that includes (CF 2 ) n wherein n=1 or 2 radicals in the vicinity of a structure surface on which the fluorocarbon polymer is to be formed. The structure surface is maintained at a temperature lower than that of the porous heat member to induce deposition and polymerization of the (CF 2 ) n wherein n=1 or 2 radicals on the structure surface.
1. A method for forming a fluorocarbon polymer on a surface of a structure, comprising the steps of:
directing a feedstock gas into a chamber and through a porous heat member comprising pores randomly arranged located within the chamber, said porous heat member having a temperature sufficient to crack the feedstock gas to produce a reactive species that includes (CF 2 ) n wherein n=1 or 2 radicals and that selectively promotes (CF 2 ) n polymerization, the reactive species being in the vicinity of a structure surface on which the fluorocarbon polymer is to be formed; and
maintaining the structure surface at a temperature lower than that of the porous heat member to induce deposition and polymerization of the (CF 2 ) n wherein n=1 or 2 radicals on the structure surface.
2. The method of claim 1 wherein the feedstock gas comprises hexafluoropropylene oxide.
3. The method of claim 1 wherein the porous heat member comprises a material having pores from about 0.01 to about 1000 micrometers in diameter.
4. The method of claim 1 wherein the porous heat member comprises a material selected from the group consisting of ceramics, metals, alloys, intermetallic compounds and combinations of these materials.
5. The method of claim 1 wherein the porous heat member comprises a material selected from the group consisting of silicon carbide, aluminum, niobium, nickel-chrome, ferro-chrome, graphite, and stainless steel.
6. The method of claim 1 wherein the porous heat member temperature is greater than about 150° C., and wherein the step of maintaining the structure surface temperature comprises maintaining the structure surface at a temperature less than about 150° C.
7. The method of claim 1 wherein the structure comprises a razor blade.
8. The method of claim 1 wherein the structure is selected from the group consisting of surgical needles, scalpels, optical fibers, lenses, and electronic conductors.
9. A method for forming a fluorocarbon polymer on a surface of a structure, comprising the steps of:
directing a feedstock gas into a chamber and through a porous heat member comprising pores randomly arranged located within the chamber, said porous heat member having a temperature sufficient to crack the feedstock gas to produce a reactive species that includes (CF 2 ) n wherein n=1 or 2 radicals and that selectively promotes CF 2 polymerization, the reactive species being in the vicinity of a structure surface on which the fluorocarbon polymer is to be formed, the feedstock gas selected from the group consisting of CF 3 CF(O)CF 2 (HFPO), C 2 F 4 , C 3 F 8 , CF 3 H, CF 2 H 2 , CF 2 N 2 , CF 3 COCF 3 , CF 2 ClCOCF 2 Cl, CF 2 ClCOCFCl 2 , CF 3 COOH, CF 2 Br 2 , CF 2 HBr, CF 2 HCl, CF 2 Cl 2 , and CF 2 FCl; C 3 F 6 , C 3 F 4 H 2 , C 3 F 2 Cl 4 , C 2 F 3 Cl 3 , C 3 F 4 Cl 2 ; (CF 3 ) 3 PF 2 , (CF 3 ) 2 PF 3 , (CF 3 )PF 4 ; (CF 3 ) 3 P, (CF 3 ) 2 P—P(CF 3 ) 2 , and (CF 3 ) 2 PX, and CF 3 PX 2 , where X is F, Cl, or H; and
maintaining the structure surface at a temperature lower than that of the porous heat member to induce deposition and polymerization of the (CF 2 ) n wherein n=1 or 2 radicals on the structure surface.
10. The method of claim 9 wherein the feedstock gas comprises HFPO.
11. The method of claim 9 wherein the porous heat member comprises a material having pores from about 0.01 to about 1000 micrometers in diameter.
12. The method of claim 9 wherein the porous heat member comprises a material selected from the group consisting of ceramics, metals, and intermetallic compounds.
13. The method of claim 9 wherein the porous heat member comprises a material selected from the group consisting of silicon carbide, niobium, ferro-chrome, graphite and stainless steel.
14. The method of claim 9 wherein the porous heat member temperature is greater than about 150° C., and wherein the step of maintaining the structure surface temperature comprises maintaining the structure surface at a temperature less than about 150° C.
15. The method of claim 9 wherein the structure comprises a razor blade.