Solid-state imaging device with autofocus and electronic apparatus
View Patent ↗There is provided a solid-state imaging device which includes a focus detection pixel that has a light shielding film, which is formed on a light receiving surface of a photoelectric conversion portion and shields light in a part of the light receiving surface, performs pupil division and photoelectric conversion of a received light flux and acquires a phase difference detection signal, where the light shielding film is formed avoiding a gate electrode of a reading gate portion to read a signal charge from the photoelectric conversion portion.
1. A solid-state imaging device comprising:
a focus detection pixel that has a light shielding film formed on a light receiving surface of a photoelectric conversion portion, the light shielding film shielding a part of the light receiving surface, the focus detection pixel configured to perform pupil division and photoelectric conversion on a received light flux and acquire a phase difference detection signal; and
a gate electrode of a reading gate portion that reads a signal charge from the photoelectric conversion portion, wherein the light shielding film and the gate electrode are non-overlapping, and wherein a region between a side surface of the light shielding film on the light receiving surface of the photoelectric conversion portion and a side surface of the gate electrode is covered with a portion of a layer different from the light shielding film.
2. The solid-state imaging device according to claim 1 , further comprising:
a pixel array portion including an imaging pixel to acquire an imaging signal,
wherein, the imaging pixel and the focus detection pixel are intermingled in the pixel array portion.
3. The solid-state imaging device according to claim 1 , wherein the light shielding film is a lowest layer film among a plurality of films laminated on the light receiving surface of the focus detection pixel.
4. The solid-state imaging device according to claim 3 , wherein the region between the side surface of the light shielding film on the light receiving surface of the photoelectric conversion portion and the side surface of the gate electrode is covered with a wire belonging to a higher layer than the light shielding film.
5. The solid-state imaging device according to claim 1 , wherein a ground potential or a power supply potential is applied to the light shielding film.
6. The solid-state imaging device according to claim 1 , wherein the focus detection pixel includes a plurality of focus detection pixels; and
a defocus direction and a defocus amount are detected using phase difference detection signals output from the plurality of focus detection pixels.
7. An electronic apparatus comprising:
a solid-state imaging device including:
a focus detection pixel that has a light shielding film formed on a light receiving surface of a photoelectric conversion portion, the light shielding film shielding a part of the light receiving surface, the focus detection pixel being configured to perform pupil division and photoelectric conversion of a received light flux and acquire a phase difference detection signal; and
a gate electrode of a reading gate portion that reads a signal charge from the photoelectric conversion portion; and
a focus mechanism that adjusts a focus based on the phase difference detection signal output from the focus detection pixel, wherein the light shielding film and the gate electrode are non-overlapping, and wherein a region between a side surface of the light shielding film on the light receiving surface of the photoelectric conversion portion and a side surface of the gate electrode is covered with a portion of a layer different from the light shielding film.
8. The electronic apparatus according to claim 7 , wherein the light shielding film is a lowest layer film among a plurality of films laminated on the light receiving surface of the focus detection pixel.
9. The electronic apparatus according to claim 8 , wherein the region between the side surface of the light shielding film on the light receiving surface of the photoelectric conversion portion and the side surface of the gate electrode is covered with a wire belonging to a higher layer than the light shielding film.
10. A solid-state imaging device comprising:
a focus detection pixel that has a light shielding film on a light receiving surface of a photoelectric conversion portion, the light shielding film shielding a part of the light receiving surface, the focus detection pixel configured to perform pupil division and photoelectric conversion on a received light flux and acquire a phase difference detection signal; and
a gate electrode of a reading gate portion that reads a signal charge from the photoelectric conversion portion,
wherein the light shielding film and the gate electrode are non-overlapping,
wherein the light shielding film is a lowest layer film among a plurality of films laminated on the light receiving surface of the focus detection pixel, and
wherein a region between a side surface of the light shielding film on the light receiving surface of the photoelectric conversion portion and a side surface of the gate electrode is covered with a wire belonging to a layer higher than the light shielding film.