Etchant composition and manufacturing method for thin film transistor using the same
An etchant composition includes ammonium persulfate (((NH 4 ) 2 )S 2 O 8 ), an azole-based compound, a water-soluble amine compound, a sulfonic acid-containing compound, a nitrate-containing compound, a phosphate-containing compound, a chloride-containing compound, and residual water.
1. A method for manufacturing a thin film transistor, comprising:
forming a gate electrode on a substrate;
forming a gate insulating layer, a semiconductor material layer, a barrier material layer, and a metal wire material layer on the gate electrode;
forming a photoresist pattern on the metal wire material layer;
performing a first step of etching, using a first etchant, through the metal wire material layer, the barrier material layer, and the semiconductor material layer to form a metal wire pattern portion, a barrier pattern portion, and a semiconductor layer covering the gate electrode and a peripheral area of the gate electrode, respectively;
performing a second step of etching, using a second etchant, through a portion of the metal wire material layer and the barrier material layer that overlaps the gate electrode,
wherein the first etchant and the second etchant have different compositions,
wherein the second etchant includes a chloride-containing compound,
wherein the photoresist pattern covers the metal wire pattern portion overlapping the gate electrode during the first step of etching, and
wherein the first etchant is configured to etch the semiconductor material layer while the second etchant is configured not to etch the semiconductor material layer.
2. The method of claim 1 , wherein the semiconductor layer is formed of an oxide semiconductor.
3. The method of claim 2 , wherein:
the metal wire material layer includes a first metal layer and a second metal layer disposed on the first metal layer, and
wherein the first metal layer includes copper, and the second metal layer includes a copper manganese alloy.
4. The method of claim 1 , wherein the semiconductor layer includes indium gallium zinc oxide (IGZO).
5. The method of claim 4 , wherein the barrier material layer includes gallium zinc oxide (GZO).
6. The method of claim 1 , wherein the first etchant includes ammonium persulfate (((NH 4 ) 2 )S 2 O 8 ), an azole-based compound, a water-soluble amine compound, a sulfonic acid-containing compound, a nitrate-containing compound, a fluorine-containing compound, and residual water.
7. The method of claim 6 , wherein the second etchant includes ammonium persulfate (((NH 4 ) 2 )S 2 O 8 ), an azole-based compound, a water-soluble amine compound, a sulfonic acid-containing compound, an assistance oxidizer, a nitrate-containing compound, a phosphate-containing compound, and residual water.
8. The method of claim 7 , wherein in the second etchant, the ammonium persulfate content is about 0.1 wt % to about 20 wt %, the azole-based compound content is about 0.01 wt % to about 2 wt %, the water-soluble amine compound content is about 0.1 wt % to about 5 wt %, the sulfonic acid-containing compound content is about 0.1 wt % to about 10 wt %, the assistance oxidizer content is about 0.1 wt % to about 2 wt %, and the nitrate-containing compound content is about 0.1 wt % to about 10 wt %.
9. The method of claim 8 , wherein the phosphate-containing compound content is about 0.1 wt % to about 5 wt %, and the chloride-containing compound content is about 0.001 wt % to about 1 wt %.
10. The method of claim 1 , wherein the exposing of the semiconductor layer disposed on an overlapping portion with the gate electrode includes forming a source electrode and a drain electrode facing each other with respect to the gate electrode.
11. A method for manufacturing a thin film transistor, comprising:
forming a gate electrode on a substrate;
forming a gate insulating layer, a semiconductor material layer, a barrier material layer, and a metal wire material layer on the gate electrode;
forming a photoresist pattern on the metal wire material layer;
performing a first step of etching, using a first etchant, through the metal wire material layer, the barrier material layer, and the semiconductor material layer to form a metal wire pattern portion, a barrier pattern portion, and a semiconductor layer covering the gate electrode and a peripheral area of the gate electrode, respectively;
performing a second step of etching, using a second etchant, through a portion of the metal wire material layer and the barrier material layer that overlaps the gate electrode,
wherein the first etchant and the second etchant have different compositions,
wherein the second etchant includes a chloride-containing compound,
wherein the photoresist pattern covers the metal wire pattern portion overlapping the gate electrode during the first step of etching, and
wherein the first etchant includes a fluorine-containing compound and omits a chloride-containing compound while the second etchant includes the chloride-containing compound and omits a fluorine-containing compound.
12. The method of claim 11 , wherein the semiconductor layer is formed of an oxide semiconductor.
13. The method of claim 12 , wherein:
the metal wire material layer includes a first metal layer and a second metal layer disposed on the first metal layer, and
wherein the first metal layer includes copper, and the second metal layer includes a copper manganese alloy.
14. The method of claim 11 , wherein the semiconductor layer includes indium gallium zinc oxide (IGZO).
15. The method of claim 14 , wherein the barrier material layer includes gallium zinc oxide (GZO).
16. The method of claim 11 , wherein the first etchant includes ammonium persulfate (((NH 4 ) 2 )S 2 O 8 ), an azole-based compound, a water-soluble amine compound, a sulfonic acid-containing compound, a nitrate-containing compound, a fluorine-containing compound, and residual water.
17. The method of claim 16 , wherein the second etchant includes ammonium persulfate (((NH 4 ) 2 )S 2 O 8 ), an azole-based compound, a water-soluble amine compound, a sulfonic acid-containing compound, an assistance oxidizer, a nitrate-containing compound, a phosphate-containing compound, and residual water.
18. The method of claim 17 , wherein in the second etchant, the ammonium persulfate content is about 0.1 wt % to about 20 wt %, the azole-based compound content is about 0.01 wt % to about 2 wt %, the water-soluble amine compound content is about 0.1 wt % to about 5 wt %, the sulfonic acid-containing compound content is about 0.1 wt % to about 10 wt %, the assistance oxidizer content is about 0.1 wt % to about 2 wt %, and the nitrate-containing compound content is about 0.1 wt % to about 10 wt %.
19. The method of claim 18 , wherein the phosphate-containing compound content is about 0.1 wt % to about 5 wt %, and the chloride-containing compound content is about 0.001 wt % to about 1 wt %.
20. The method of claim 11 , wherein the exposing of the semiconductor layer disposed on an overlapping portion with the gate electrode includes forming a source electrode and a drain electrode facing each other with respect to the gate electrode.