Integrated circuit coupling system with waveguide circuitry and method of manufacture thereof
View Patent ↗A method of manufacture of an integrated circuit coupling system includes: forming a waveguide assembly, having a top clad over an open end of an optical core; forming a first photoresist having a base photoresist pattern shape with sloped photoresist sidewalls tapered down to expose a portion of the top clad; forming a recess having clad sidewalls from the portion of the top clad exposed by the base photoresist pattern shape, the clad sidewalls having a shape replicating a shape of the base photo resist pattern shape; and forming an optical vertical insertion area, from the clad sidewalls forming the recess, having a pocket trench, a horizontal step, and a mirror with a reflective material selectively applied to a section of the clad sidewalls and exposing the open end opposite to the mirror, the horizontal step between the mirror and the pocket trench.
1. A method of manufacture of an integrated circuit coupling system comprising:
forming a waveguide assembly, having a top clad over an open end of an optical core;
forming a first photoresist having a base photoresist pattern shape with sloped photoresist sidewalls tapered down to expose a portion of the top clad;
forming a recess having clad sidewalls from the portion of the top clad exposed by the base photoresist pattern shape, the clad sidewalls having a shape replicating a shape of the base photoresist pattern shape; and
forming an optical vertical insertion area, from the clad sidewalls forming the recess, having a pocket trench, a horizontal step, and a mirror with a reflective material selectively applied to a section of the clad sidewalls and exposing the open end opposite to the mirror, the horizontal step between the mirror and the pocket trench.
2. The method as claimed in claim 1 wherein forming the first photoresist includes baking the first photoresist to form the sloped photoresist sidewalls.
3. The method as claimed in claim 1 further comprising etching the horizontal step between the pocket trench and the mirror.
4. The method as claimed in claim 1 wherein forming the waveguide assembly includes forming a second optical vertical insertion area.
5. The method as claimed in claim 1 comprising attaching a lid over the optical vertical insertion area.
6. A method of manufacture of an integrated circuit coupling system comprising:
providing a substrate;
forming a waveguide assembly, having a top clad over an open end of an optical core and the substrate;
forming a first photoresist having a base photoresist pattern shape with sloped photoresist sidewalls tapered down to expose a portion of the top clad;
forming a recess having clad sidewalls from the portion of the top clad exposed by the base photoresist pattern shape, the clad sidewalls having a shape replicating a shape of the base photoresist pattern shape; and
forming an optical vertical insertion area, from the clad sidewalls forming the recess, having a pocket trench, a horizontal step, and a mirror with a reflective material selectively applied to a section of the clad sidewalls and exposing the open end opposite to the mirror, the horizontal step between the mirror and the pocket trench.
7. The method as claimed in claim 6 further comprising etching the horizontal step between the pocket trench and the mirror, the horizontal step below the optical core.
8. The method as claimed in claim 6 further comprising applying a second photoresist having a resist opening, over the waveguide assembly, the resist opening formed by an alignment surface and a boundary surface of the second photoresist and between the clad sidewalls.
9. The method as claimed in claim 6 further comprising applying a second photoresist having a resist opening, over the waveguide assembly, the resist opening formed by an alignment surface and a boundary surface of the second photoresist.
10. The method as claimed in claim 6 wherein forming the optical vertical insertion area having the mirror includes a vertical trench side and a vertical side portion of the optical vertical insertion area, and the open end, exposed from the reflective material.