Gallium nitride devices with conductive regions
View Patent ↗Semiconductor structures comprising a III-nitride (e.g., gallium nitride) material region and methods associated with such structures are provided. In some embodiments, the structures include an electrically conductive material (e.g., gold) separated from certain other region(s) of the structure (e.g., a silicon substrate) by a barrier material in order to limit, or prevent, undesirable reactions between the electrically conductive material and the other component(s) which can impair device performance. In certain embodiments, the electrically conductive material may be formed in a via. For example, the via can extend from a topside of the device to a backside so that the electrically conductive material connects a topside contact to a backside contact. The structures described herein may form the basis of a number of semiconductor devices including transistors (e.g., FET), Schottky diodes, light-emitting diodes and laser diodes, amongst others.
1. A method of forming a semiconductor structure comprising:
forming a gallium nitride layer on a substrate;
forming a via that extends through at least a portion of said substrate;
forming a barrier layer along sidewalls of said via;
forming an electrically conductive layer on a back surface of said substrate;
fabricating a semiconductor device, said semiconductor device having first and second power electrodes situated over said gallium nitride layer;
said via coupling said electrically conductive layer on said back surface of said substrate to a topside contact formed over said substrate, said topside contact overlying a conductive field plate extending over one of said first and second power electrodes.
2. The method of claim 1 further comprising heating said semiconductor structure to form a liquid eutectic comprising said electrically conductive layer and said substrate.
3. The method of claim 2 further comprising cooling said liquid eutectic to form a bond between said semiconductor structure and a component.
4. The method of claim 1 , wherein said substrate comprises silicon.
5. The method of claim 1 , wherein said electrically conductive layer comprises aluminum.
6. The method of claim 1 , wherein said electrically conductive layer includes a first portion comprising gold and a second portion comprising aluminum.
7. The method of claim 1 further comprising forming a passivating layer over said gallium nitride layer.
8. The method of claim 1 , wherein said semiconductor structure is a transistor comprising a source electrode, a drain electrode and a gate electrode, said source electrode being one of said first and second power electrodes, and said drain electrode being another of said first and second power electrodes.
9. The method of claim 8 , wherein said gate electrode is defined by an electrode-defining layer comprising silicon nitride.
10. The method of claim 1 further comprising forming a transition layer between said substrate and said gallium nitride layer.
11. The method of claim 10 , wherein said transition layer is compositionally-graded.
12. The method of claim 10 further comprising forming a silicon nitride layer between said substrate and said transition layer.
13. A semiconductor device comprising:
a substrate;
a gallium nitride layer situated on said substrate;
an electrically conductive layer situated over at least a portion of said substrate;
a barrier layer separating the electrically conductive layer from said substrate;
a via situated in said semiconductor device;
first and second power electrodes situated over said gallium nitride layer;
said via coupling a backside contact at a back surface of said substrate to a topside contact formed over said substrate, said topside contact overlying a conductive field plate extending over one of said first and second power electrodes.
14. The semiconductor device of claim 13 , wherein said substrate comprises silicon.
15. The semiconductor device of claim 13 , wherein said electrically conductive layer comprises aluminum.
16. The semiconductor device of claim 13 , wherein said electrically conductive layer includes a first portion comprising gold and a second portion comprising aluminum.
17. The semiconductor device of claim 13 , wherein said semiconductor device is a transistor comprising a source electrode, a drain electrode and a gate electrode, said source electrode being one of said first and second power electrodes, and said drain electrode being another of said first and second power electrodes.
18. The semiconductor device of claim 17 , wherein said gate electrode is defined by an electrode-defining layer comprising silicon nitride.
19. The semiconductor device of claim 13 , further comprising a transition layer situated between said substrate and said gallium nitride layer.
20. The semiconductor device of claim 19 , further comprising a silicon nitride layer situated between said substrate and said transition layer.