Piezoelectric thin film, method for manufacturing same, inkjet head, method for forming image using inkjet head, angular velocity sensor, method for measuring angular velocity using angular velocity sensor, piezoelectric power generation element, and method for generating power using piezoelectric power generation element
View Patent ↗Provided is a piezoelectric thin film including a non-lead-containing (that is, lead-free) ferroelectric material and having high piezoelectric performance comparable to that of PZT, and a method of manufacturing the piezoelectric thin film. The piezoelectric film according to the present invention comprises a laminate structure. The laminate structure comprises an electric film and a (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film. x represents a value of not less than 0.03 and not more than 0.15. The (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film has a (110) surface orientation only. The (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film has an orthorhombic crystal structure only.
1. A piezoelectric film comprising a laminate structure, wherein the laminate structure comprises an electric film and a (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film;
x represents a value of not less than 0.03 and not more than 0.15;
the (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film has a (110) surface orientation only; and
the (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film has an orthorhombic crystal structure only.
2. The piezoelectric film according to claim 1 , wherein
the (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film contains manganese.
3. An ink jet head comprising:
a piezoelectric thin film having a piezoelectric layer sandwiched between a first electrode and a second electrode;
a vibration layer bonded to the piezoelectric thin film; and
a pressure chamber member having a pressure chamber for storing ink and bonded to a surface of the vibration layer opposite to a surface to which the piezoelectric thin film is bonded,
wherein the vibration layer is bonded to the piezoelectric thin film so that the vibration layer is displaceable in its film thickness direction according to a deformation of the piezoelectric thin film produced by a piezoelectric effect,
the vibration layer and the pressure chamber member are bonded to each other so that a volumetric capacity of the pressure chamber changes according to a displacement of the vibration layer and so that the ink in the pressure chamber is ejected according to a change in the volumetric capacity of the pressure chamber,
the piezoelectric layer is a (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film;
x represents a value of not less than 0.03 and not more than 0.15;
the (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film has a (110) surface orientation only; and
the (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film has an orthorhombic crystal structure only.
4. The ink jet head according to claim 3 , wherein
the (1-x)(Na,Bi)TiO 3 -xBaTiO 3 piezoelectric film contains manganese.
5. A method of forming an image by an ink jet head, the method comprising steps of:
(a) preparing the ink jet head, wherein
the ink jet head includes: a piezoelectric thin film having a piezoelectric layer sandwiched between a first electrode and a second electrode; a vibration layer bonded to the piezoelectric thin film; and a pressure chamber member having a pressure chamber for storing ink and bonded to a surface of the vibration layer opposite to a surface to which the piezoelectric thin film is bonded,
the vibration layer is bonded to the piezoelectric thin film so that the vibration layer is displaceable in its film thickness direction according to a deformation of the piezoelectric thin film produced by a piezoelectric effect,
the vibration layer and the pressure chamber member are bonded to each other so that a volumetric capacity of the pressure chamber changes according to a displacement of the vibration layer and so that the ink in the pressure chamber is ejected according to a change in the volumetric capacity of the pressure chamber,
the piezoelectric layer is a (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film;
x represents a value of not less than 0.03 and not more than 0.15;
the (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film has a (110) surface orientation only; and
the (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film has an orthorhombic crystal structure only; and
(b) applying a voltage to the piezoelectric layer through the first electrode and the second electrode to displace, based on the piezoelectric effect, the vibration layer in its film thickness direction so that the volumetric capacity of the pressure chamber changes and the ink is ejected from the pressure chamber by the displacement.
6. The method according to claim 5 , wherein the (1-x)(Na,Bi)TiO 3 -xBaTiO 3 film contains manganese.
7. A method for fabricating a piezoelectric film, the method comprising:
(a) forming a (1-x)(Na,Bi)TiO 3-x BaTiO 3 film (x represents a value of not less than 0.03 and not more than 0.15) having only an orthorhombic crystal structure and only a (110) orientation by a sputtering method on an electric film.
8. The method according to claim 7 , wherein the (1-x)(Na,Bi)TiO 3-x BaTiO 3 film contains manganese.