Buried hard mask for embedded semiconductor device patterning
View Patent ↗Methods and apparatus for manufacturing semiconductor devices, and such semiconductor devices, are described. According to various aspects of the disclosure, a semiconductor device can be manufactured by forming a core region of the semiconductor device and forming a periphery region of the semiconductor device. A first polysilicon region can then be formed over the core and periphery regions of the semiconductor device. A first mask is formed on the first poly silicon layer and a second polysilicon layer is disposed such that the second polysilicon layer covers the first mask. A second mask can then be formed on the second polysilicon layer. After forming the second mask, portions of the first and second polysilicon layers that are uncovered by either the first or second masks are removed.
1. A method of manufacturing an embedded semiconductor device, comprising:
forming a core region of the semiconductor device, wherein the core region is configured to contain one or more memory devices;
forming a periphery region of the semiconductor device, wherein the periphery region is configured to contain logical gates to control the one or more memory devices;
disposing a first polysilicon layer over the core and periphery regions of the semiconductor device;
forming a first mask on the first polysilicon layer;
disposing a second polysilicon layer such that the second polysilicon layer covers the first mask;
forming a second mask on the second polysilicon layer in the core region without forming the second mask in the periphery region; and
removing portions of the first and second polysilicon layers that are uncovered by either of the first and second masks.
2. The method of claim 1 , wherein the first mask is disposed on the periphery region of the semiconductor device.
3. The method of claim 2 , further comprising forming logic gates from a portion of the periphery region that is masked by the first mask.
4. The method of claim 1 , wherein the second mask is disposed on the core portion of the semiconductor device.
5. The method of claim 4 , further comprising forming bitlines or writelines from a portion of the core region that is masked by the second mask.
6. The method of claim 1 , wherein the first and second masks comprise oxides, nitrides, or an oxide/nitride combination.
7. The method of claim 1 , wherein the first and second masks comprise the same material.
8. The method of claim 1 , further comprising forming one or more memory elements in the core region of the semiconductor.
9. The method of claim 1 , further comprising forming one or more logical devices in the periphery region of the semiconductor.
10. The method of claim 1 , wherein the removed portions of the first and second polysilicon layers are removed from the core and periphery regions simultaneously.
11. An apparatus, comprising:
a semiconductor fabrication module; and
a controller configured to cause the semiconducting fabrication module to:
form a core region of a semiconductor device, wherein the core region is configured to contain one or more memory devices;
form a periphery region of the semiconductor device wherein the periphery region is configured to contain logical gates to control the one or more memory devices;
dispose a first polysilicon layer over the core and periphery regions of the semiconductor device;
form a first mask on the first polysilicon layer;
dispose a second polysilicon layer such that the second polysilicon layer covers the first mask;
form a second mask on the second polysilicon layer in the core region without forming the second mask in the periphery region; and
remove portions of the first and second polysilicon layers that are uncovered by either of the first and second masks.
12. The apparatus of claim 11 , wherein the controller is further configured to cause the fabrication module to dispose the first mask on the periphery region of the semiconductor device.
13. The apparatus of claim 12 , wherein the controller is further configured to cause the fabrication module to form logic gates from a portion of the periphery region that is masked by the first mask.
14. The apparatus of claim 11 , wherein the controller is further configured to cause the fabrication module to dispose the second mask on the core portion of the semiconductor device.
15. The apparatus of claim 14 , wherein the controller is further configured to cause the fabrication module to form bitlines or writelines from a portion of the core region that is masked by the second mask.
16. The apparatus of claim 11 , wherein the first and second masks comprise oxides, nitrides, or an oxide/nitride combination.
17. The apparatus of claim 11 , wherein the first and second masks comprise the same material.
18. The apparatus of claim 11 , wherein the controller is further configured to cause the fabrication module to form one or more memory elements in the core region of the semiconductor.
19. The apparatus of claim 11 , wherein the controller is further configured to cause the fabrication module to form one or more logical devices in the periphery region of the semiconductor.
20. The apparatus of claim 11 , wherein the controller is further configured to cause the fabrication module to remove the removed portions of the first and second polysilicon layers from the core and periphery regions simultaneously.