Thin-film transistor device and method for manufacturing thin-film transistor device
A thin-film transistor device includes: a gate electrode above a substrate; a gate insulating film on the gate electrode; a crystalline silicon thin film including a channel region which is provided on the gate insulating film; semiconductor films on at least the channel region; an insulating film made of an organic material which is provided over the channel region and above the semiconductor films; a source electrode over at least an end portion of the insulating film; and a drain electrode over at least the other end portion of the insulating film and facing the source electrode. The semiconductor films include at least a first semiconductor film and a second semiconductor film provided on the first semiconductor film. A relationship E CP <E C1 is satisfied where E CP and E C1 denote energy levels at lower ends of conduction bands of the crystalline silicon thin film and the first semiconductor film, respectively.
1. A thin-film transistor device comprising:
a gate electrode above a substrate;
a gate insulating film above the gate electrode;
a crystalline silicon thin film above the gate insulating film, the crystalline silicon thin film including a channel region;
a plurality of semiconductor films above at least the channel region;
an insulating film over the channel region and above the semiconductor films, the insulating film being composed of an organic material;
a source electrode over at least an end portion of the insulating film; and
a drain electrode over at least an other end portion of the insulating film, the drain electrode facing the source electrode,
wherein the semiconductor films include at least a first semiconductor film and a second semiconductor film provided above the first semiconductor film,
E CP <E C1 where E CP denotes an energy level at a lower end of a conduction band of the crystalline silicon thin film and E C1 denotes an energy level at a lower end of a conduction band of the first semiconductor film,
the first semiconductor film is provided on the crystalline silicon thin film, and
the energy level E CP at the lower end of the conduction band of the crystalline silicon thin film and the energy level E C1 at the lower end of the conduction band of the first semiconductor film are adjusted to suppress a spike at a junction between the crystalline silicon thin film and the first semiconductor film.
2. The thin-film transistor device according to claim 1 ,
wherein electron affinity of the first semiconductor film is different from electron affinity of the second semiconductor film.
3. The thin-film transistor device according to claim 2 ,
wherein the electron affinity of the first semiconductor film is greater than the electron affinity of the second semiconductor film.
4. The thin-film transistor device according to claim 1 ,
wherein the first semiconductor film and the second semiconductor film are semiconductor films made mainly of silicon and have different band gaps.
5. The thin-film transistor device according to claim 4 ,
wherein the band gap of the first semiconductor film is closer to a band gap of the crystalline silicon thin film than the band gap of the second semiconductor film is.
6. The thin-film transistor device according to claim 1 ,
wherein the first semiconductor film and the second semiconductor film are amorphous silicon films.
7. The thin-film transistor device according to claim 1 ,
wherein the first semiconductor film and the second semiconductor film are semiconductor films made mainly of silicon and have different crystallization ratios.
8. The thin-film transistor device according to claim 7 ,
wherein the crystallization ratio of the first semiconductor film is greater than the crystallization ratio of the second semiconductor film.
9. The thin-film transistor device according to claim 1 ,
wherein, from the first semiconductor film to the crystalline silicon thin film, no barrier exists between the conduction band of the first semiconductor film and the conduction band of the crystalline silicon thin film.
10. The thin-film transistor device according to claim 9 ,
wherein the first semiconductor film includes one of carbon and germanium.