Image sensor with improved color crosstalk
View Patent ↗An image sensor comprises a substrate of a first conductivity type. First and second pixels are arrayed over the substrate. A potential barrier is formed in a region of the substrate corresponding to the first pixel but not in a region of the substrate corresponding to the second pixel. The second pixel is responsive to a color having a wavelength longer than the color to which the first pixel is responsive. The potential barrier is doped with dopants by a high energy ion implantation dopants or by an ion implantation or diffusion during epitaxial growth of the P-type epitaxial layer.
1. A method of forming an image sensor, the method comprising:
initiating a growth of an epitaxial layer;
stopping the growth of the epitaxial layer at a first depth;
while the growth of the epitaxial layer is stopped at the first depth, forming a portion of a potential barrier in the epitaxial layer at the first depth in a first pixel region, wherein the potential barrier includes a gap under a second pixel region; and
after forming the portion of the potential barrier, continuing the growth of the epitaxial layer until the epitaxial layer reaches a final depth;
wherein the gap is arranged to allow electrons to flow from a portion of the epitaxial layer below the potential barrier to a portion of the epitaxial layer above the potential barrier.
2. The method of claim 1 , wherein said forming a portion of a potential barrier in the epitaxial layer comprises performing a low-energy ion implantation.
3. The method of claim 2 , wherein said performing a low-energy ion implantation comprises implanting Boron.
4. The method of claim 1 , further comprising:
stopping the growth of the epitaxial layer at a second depth; and
while the growth of the epitaxial layer is stopped at the second depth, forming an additional portion of the potential barrier in the epitaxial layer at the second depth in a third pixel region.
5. The method of claim 1 , further comprising:
forming a first filter above the first pixel region, wherein the first filter is configured to pass light of a first color into the first pixel region; and
forming a second filter above the second pixel region, wherein the second filter is configured to pass light of a second color into the second pixel region.
6. The method of claim 5 , wherein:
the first color comprises at least one of green or blue; and
the second color comprises red.
7. The method of claim 1 , wherein the potential barrier comprises a P-type doped region.
8. A method of forming an image sensor, the method comprising:
initiating a growth of an epitaxial layer;
stopping the growth of the epitaxial layer at a first depth;
while the growth of the epitaxial layer is stopped at the first depth, forming a portion of a potential barrier in the epitaxial layer at the first depth in a first pixel region;
after forming the portion of the potential barrier, continuing the growth of the epitaxial layer until the epitaxial layer reaches a final depth;
forming a first photodiode in the first pixel region; and
forming a second photodiode in a second pixel region;
wherein the portion of the potential barrier is arranged to sweep electrons formed below the portion of the potential barrier to the second photodiode.
9. The method of claim 8 , wherein said forming a portion of a potential barrier in the epitaxial layer comprises performing a low-energy ion implantation.
10. The method of claim 9 , wherein said performing a low-energy ion implantation comprises implanting Boron.
11. The method of claim 8 , further comprising:
forming a first filter above the first pixel region, wherein the first filter is configured to pass light of a first color into the first pixel region; and
forming a second filter above the second pixel region, wherein the second filter is configured to pass light of a second color into the second pixel region.
12. The method of claim 11 , wherein:
the first color comprises at least one of green or blue; and
the second color comprises red.
13. The method of claim 8 , wherein the potential barrier comprises a P-type doped region.
14. A method of forming an image sensor, the method comprising:
initiating a growth of an epitaxial layer;
stopping the growth of the epitaxial layer at a first depth;
while the growth of the epitaxial layer is stopped at the first depth, forming a first portion of a potential barrier in the epitaxial layer at the first depth in a first pixel region, wherein the first portion of the potential barrier includes a gap under a second pixel region;
after forming the first portion of the potential barrier, continuing the growth of the epitaxial layer until the epitaxial layer reaches a second depth;
stopping the growth of the epitaxial layer at the second depth;
while the growth of the epitaxial layer is stopped at the second depth, forming a second portion of the potential barrier in the epitaxial layer at the second depth in a third pixel region;
after forming the second portion of the potential barrier, continuing the growth of the epitaxial layer until the epitaxial layer reaches a final depth;
forming a first photodiode in the first pixel region;
forming a second photodiode in a second pixel region; and
forming a third photodiode in the third pixel region;
wherein the gap is arranged to allow electrons to flow from a portion of the epitaxial layer below the potential barrier to a portion of the epitaxial layer above the potential barrier.
15. The method of claim 14 , wherein:
said forming a first portion of a potential barrier in the epitaxial layer comprises performing a low-energy ion implantation; and
said forming a second portion of the potential barrier in the epitaxial layer comprises performing a low-energy ion implantation.
16. The method of claim 15 , wherein said performing a low-energy ion implantation comprises implanting Boron.
17. The method of claim 14 , further comprising:
forming a first filter above the first pixel region, wherein the first filter is configured to pass light of a first color into the first pixel region;
forming a second filter above the second pixel region, wherein the second filter is configured to pass light of a second color into the second pixel region; and
forming a third filter above the third pixel region, wherein the third filter is configured to pass light of a third color into the third pixel region.
18. The method of claim 17 , wherein:
the first color comprises green;
the second color comprises red; and
the third color comprises blue.
19. The method of claim 14 , wherein the potential barrier comprises a P-type doped region.