Method and system of providing dopant concentration control in different layers of a semiconductor device
View Patent ↗A method and system for controlling the amount of a second material incorporated into a first material by controlling the amount of a third material which can interact with the second material.
1. A method comprising:
vaporizing a first material to be deposited on a substrate and a dopant material for doping the first material;
controlling an amount of the dopant material with which to dope the first material by having the dopant material chemically react with a third material;
doping the first material with the controlled amount of the dopant material such that only a portion of the dopant material is deposited on the substrate; and
forming the doped first material on the substrate,
wherein the third material comprises an oxidizing agent.
2. The method of claim 1 , wherein the oxidizing agent comprises oxygen gas.
3. The method of claim 1 , wherein the oxidizing agent comprises water vapor.
4. The method of claim 1 , wherein the second material comprises silicon.
5. The method of claim 4 , wherein the first material has a silicon concentration in the range of about 0.0001% to about 5%.
6. The method of claim 1 , wherein the second material comprises germanium.
7. The method of claim 1 , wherein the first material comprises one of cadmium sulfide, cadmium telluride, cadmium selenide, zinc telluride, zinc sulfide, zinc selenide, and any pseudo-binary or ternary compounds thereof.
8. A method comprising:
vaporizing a deposition material which includes a dopant in a first deposition chamber;
initiating flow of the deposition material which includes the dopant into a second deposition chamber for deposition onto a substrate in the second deposition chamber, the second deposition chamber being in vapor communication with the first deposition chamber;
dispersing a reacting agent in at least one of the first and second deposition chambers;
reacting the reacting agent with the dopant in the at least one of the first and second deposition chambers; and
adjusting flow of the reacting agent to control the amount of dopant incorporated in the deposition material which is deposited on the substrate such that only a portion of the dopant is deposited on the substrate,
wherein the reacting agent comprises an oxidizing agent.
9. The method of claim 8 , wherein the step of dispersing a reacting agent in at least one of the first and second deposition chambers comprises dispersing the reacting agent in the second deposition chamber, and wherein the step of reacting the reacting agent with the dopant in the at least one of the first and second deposition chambers occurs in the second deposition chamber.
10. The method of claim 8 , wherein the step of dispersing a reacting agent in at least one of the first and second deposition chambers comprises dispersing the reacting agent in the first deposition chamber, and wherein the step of reacting the reacting agent with the dopant in the at least one of the first and second deposition chambers occurs in the first deposition chamber.
11. The method of claim 10 , wherein the step of dispersing a reacting agent in at least one of the first and second deposition chambers comprises dispersing the reacting agent in the second deposition chamber, and wherein the step of reacting the reacting agent with the dopant in the at least one of the first and second deposition chambers occurs in the second deposition chamber.
12. The method of claim 10 , further comprising:
dispersing additional reacting agent in the second deposition chamber; and
reacting the additional reacting agent in the second deposition chamber.
13. The method of claim 8 , wherein the oxidizing agent comprises oxygen gas.
14. The method of claim 8 , wherein the oxidizing agent comprises water vapor.
15. The method of claim 8 , wherein the dopant comprises silicon.
16. The method of claim 15 , wherein the deposited material has a silicon concentration in the range of about 0.0001% to about 5%.
17. The method of claim 8 , wherein the dopant comprises germanium.
18. The method of claim 8 , wherein the deposition material comprises one of cadmium sulfide, cadmium telluride, cadmium selenide, zinc telluride, zinc sulfide, zinc selenide, and any pseudo-binary or ternary compounds thereof.
19. The method of claim 8 , wherein the deposition comprises one of vapor transport deposition, close-space sublimation, sputtering, pulse laser deposition, and chemical vapor deposition.
20. The method of claim 8 , further comprising adjusting the temperature of the second deposition chamber.
21. The method of claim 8 , further comprising adjusting the flow of the reacting agent into the at least one of the first and second deposition chambers.
22. The method of claim 8 , wherein the deposition material further comprises a base material, wherein the reactivity of the dopant for the reacting agent is greater than the reactivity of the dopant for the base material.
23. The method of claim 8 , wherein at least one product of the step of reacting the reacting agent with the dopant in the at least one of the first and second deposition chambers comprises one of tellurium gas, sulfur gas, sulfur dioxide gas, and selenium gas.
24. A method comprising:
vaporizing a deposition material which includes a dopant in a first deposition chamber;
initiating flow of the deposition material which includes the dopant into a second deposition chamber for deposition onto a substrate in the second deposition chamber, the second deposition chamber being in vapor communication with the first deposition chamber;
dispersing a reacting agent in at least one of the first and second deposition chambers;
reacting the reacting agent with the dopant in the at least one of the first and second deposition chambers; and
adjusting flow of the reacting agent to control the amount of dopant incorporated in the deposition material which is deposited on the substrate such that only a portion of the dopant is deposited on the substrate,
wherein the step of reacting the reacting agent with the dopant in the at least one of the first and second deposition chambers comprises at least one chemical reaction selected from the group consisting of:
SiTe x(g) +O 2(g) →SiO 2(s) x/ 2Te 2(g) ;
SiS x(g) +O 2(g) →SiO 2(s) +x S (g) ;
SiS x(g) +O 2(g) →SiO 2(s) +SO 2(g) ; and
SiSe x(g) +O 2(g) →SiO 2(s) +x/ 2Se 2(g) .
25. The method of claim 8 , wherein the step of reacting the reacting agent with the dopant in the at least one of the first and second deposition chambers comprises at least one chemical reaction selected from the group consisting of:
SiTe x(g) +O 2(g) →SiO 2(s) x/ 2Te 2(g) ;
SiS x(g) +O 2(g) →SiO 2(s) +x S (g) ;
SiS x(g) +O 2(g) →SiO 2(s) +SO 2(g) ; and
SiSe x(g) +O 2(g) →SiO 2(s) +x/ 2Se 2(g) .