Eddy current flaw detection system and eddy current flaw detection method

1. An eddy current flaw detection system comprising:

an eddy current flaw detection probe having a substrate facing an inspection surface, and at least one exciting coil and at least two detecting coils provided on the substrate;

a scanning device which scans the eddy current flaw detection probe on the inspection surface;

a scan control device which drives and controls the scanning device to control a scan position and an attitude angle of the eddy current flaw detection probe; and

an eddy current flaw detection device which acquires results of detection of a plurality of detection points corresponding to combinations of the exciting and detecting coils for each scan position of the eddy current flaw detection probe, wherein said eddy current flaw detection system includes:

detection point three-dimensional coordinate acquiring means which acquires three-dimensional coordinates of the detection points for each scan position of the eddy current flaw detection probe;

three-dimensional flaw detection data generating means which generates three-dimensional flaw detection data including the three-dimensional coordinates of the detection points and detection results thereof corresponding to the three-dimensional coordinates;

display means which displays a three-dimensional model of the inspection surface and displays the detection results of the detection points on the three-dimensional model of the inspection surface in color tones, based on the three-dimensional flaw detection data,

probe structure storing means which stores in advance relations in position between the detection points on the substrate of the eddy current flaw detection probe,

wherein the detection point three-dimensional coordinate acquiring means includes:

first detection point three-dimensional coordinate computing means which computes a three-dimensional coordinate of a specific detection point of the detection points corresponding to the scan position of the eddy current flaw detection probe based on control parameters of the scanning device,

probe attitude angle computing means which computes a yaw angle of the eddy current flaw detection probe based on the control parameters of the scanning device, and

second detection point three-dimensional coordinate computing means which plots the specific detection point on the three-dimensional model of the inspection surface, plots other detection points than the specific detection point on the three-dimensional model of the inspection surface based on the yaw angle of the eddy current flaw detection probe and the relations in position between the detection points on the substrate, and thereby computes three-dimensional coordinates of said other detection points.

2. The eddy current flaw detection system according to claim 1 ,

wherein the detection point three-dimensional coordinate acquiring means further includes probe pressing direction computing means which computes a direction for pressing the eddy current flaw detection probe against the inspection surface based on the control parameters of the scanning device, and

wherein when the computed three-dimensional coordinate of the specific detection point does not coincide with the three-dimensional model of the inspection surface, the first detection point three-dimensional coordinate computing means moves the three-dimensional coordinate of the specific detection point in the pressing direction to correct the three-dimensional coordinate so as to coincide with the three-dimensional model of the inspection surface.

3. An eddy current flaw detection system comprising:

an eddy current flaw detection probe having a substrate facing an inspection surface, and at least one exciting coil and at least two detecting coils provided on the substrate;

a scanning device which scans the eddy current flaw detection probe on the inspection surface;

a scan control device which drives and controls the scanning device to control a scan position and an attitude angle of the eddy current flaw detection probe; and

an eddy current flaw detection device which acquires results of detection of a plurality of detection points corresponding to combinations of the exciting and detecting coils for each scan position of the eddy current flaw detection probe, wherein said eddy current flaw detection system includes:

detection point three-dimensional coordinate acquiring means which acquires three-dimensional coordinates of the detection points for each scan position of the eddy current flaw detection probe;

three-dimensional flaw detection data generating means which generates three-dimensional flaw detection data including the three-dimensional coordinates of the detection points and detection results thereof corresponding to the three-dimensional coordinates;

display means which displays a three-dimensional model of the inspection surface and displays the detection results of the detection points on the three-dimensional model of the inspection surface in color tones, based on the three-dimensional flaw detection data;

a plurality of markers provided in the substrate of the eddy current flaw detection probe;

imaging means which images the markers for each scan position of the eddy current flaw detection probe; and

probe structure storing means which stores in advance layout relations between the substrate and the markers at the eddy current flaw detection probe and layout relations between the substrate and the detection points,

wherein the detection point three-dimensional coordinate acquiring means includes:

marker three-dimensional coordinate computing means which computes three-dimensional coordinates of the markers based on images of the markers for each scan position of the eddy current flaw detection probe, and

detection point three-dimensional coordinate computing means which computes a shape and layout of the substrate based on the three-dimensional coordinates of the markers and the layout relations between the substrate and the markers for each scan position of the eddy current flaw detection probe, and further computes three-dimensional coordinates of the detection points based on the layout relations between the substrate and the detection points.

4. The eddy current flaw detection system according to claim 3 , further including three-dimensional model generating means which generates a three-dimensional model of the inspection surface based on the three-dimensional coordinates of the detection points or the three-dimensional coordinates of the markers which have been computed for each scan position of the eddy current flaw detection probe,

wherein the display means displays the three-dimensional model of the inspection surface generated by the three-dimensional model generating means.

5. An eddy current flaw detection method comprising the steps of:

scanning an eddy current flaw detection probe on an inspection surface, the eddy current flaw detection probe having a substrate facing the inspection surface, and at least one exciting coil and at least two detecting coils provided on the substrate; and

acquiring results of detection of a plurality of detection points corresponding to combinations of the exciting and detecting coils for each scan position of the eddy current flaw detection probe, wherein said eddy current flaw detection method includes:

a first procedure for acquiring three-dimensional coordinates of the detection points for each scan position of the eddy current flaw detection probe;

a second procedure for generating three-dimensional flaw detection data including the three-dimensional coordinates of the detection points and detection results thereof corresponding to the three-dimensional coordinates; and

a third procedure for displaying a three-dimensional model of the inspection surface and displaying the detection results of the detection points on the three-dimensional model of the inspection surface in color tones based on the three-dimensional flaw detection data, wherein the first procedure includes:

a fourth procedure for computing a three-dimensional coordinate of a specific detection point of the detection points corresponding to the scan position of the eddy current flaw detection probe based on control parameters of a scanning device for scanning the eddy current flaw detection probe;

a fifth procedure for computing a yaw angle of the eddy current flaw detection probe based on the control parameters of the scanning device; and

a sixth procedure for plotting the specific detection point on the three-dimensional model of the inspection surface, plotting other detection points than the specific detection point on the three-dimensional model of the inspection surface based on the yaw angle of the eddy current flaw detection probe and relations in position between the detection points on the substrate, and thereby computing three-dimensional coordinates of said other detection points.

6. The eddy current flaw detection method according to claim 5 , wherein the first procedure further includes a seventh procedure for computing a direction for pressing the eddy current flaw detection probe against the inspection surface based on the control parameters of the scanning device,

wherein when the computed three-dimensional coordinate of the specific detection point does not coincide with the three-dimensional model of the inspection surface, the fourth procedure moves the three-dimensional coordinate of the specific detection point in the pressing direction to correct the three-dimensional coordinate so as to coincide with the three-dimensional model of the inspection surface.

7. An eddy current flaw detection method comprising the steps of:

scanning an eddy current flaw detection probe on an inspection surface, the eddy current flaw detection probe having a substrate facing the inspection surface, and at least one exciting coil and at least two detecting coils provided on the substrate; and

acquiring results of detection of a plurality of detection points corresponding to combinations of the exciting and detecting coils for each scan position of the eddy current flaw detection probe, wherein said eddy current flaw detection method includes:

a first procedure for acquiring three-dimensional coordinates of the detection points for each scan position of the eddy current flaw detection probe;

a second procedure for generating three-dimensional flaw detection data including the three-dimensional coordinates of the detection points and detection results thereof corresponding to the three-dimensional coordinates; and

a third procedure for displaying a three-dimensional model of the inspection surface and displaying the detection results of the detection points on the three-dimensional model of the inspection surface in color tones based on the three-dimensional flaw detection data, wherein the first procedure includes:

an eighth procedure for imaging a plurality of markers provided in the substrate of the eddy current flaw detection probe for each scan position of the eddy current flaw detection probe;

a ninth procedure for computing three-dimensional coordinates of the markers based on images of the markers for each scan position of the eddy current flaw detection probe; and

a tenth procedure for computing a shape and layout of the substrate based on the three-dimensional coordinates of the markers and layout relations between the substrate and the markers for each scan position of the eddy current flaw detection probe, and further computing three-dimensional coordinates of the detection points based on layout relations between the substrate and the detection points.

8. The eddy current flaw detection method according to claim 7 , further including an eleventh procedure for generating a three-dimensional model of the inspection surface based on the three-dimensional coordinates of the detection points or the three-dimensional coordinates of the markers which have been computed for each scan position of the eddy current flaw detection probe,

wherein the third procedure displays the three-dimensional model of the inspection surface generated in the eleventh procedure.