Phase-change memory device having multiple diodes
View Patent ↗A phase-change memory device with an improved current characteristic is provided. The phase-change memory device includes a metal word line, a semiconductor layer of a first conductivity type being in contact with the metal word line, and an auxiliary diode layer being in contact with metal word line and the semiconductor layer.
1. A phase-change memory device, comprising:
a semiconductor substrate;
a polysilicon layer of a first conductivity type formed on the semiconductor substrate;
a metal word line formed on the polysilicon layer; and
an auxiliary diode layer, disposed on edges of the polysilicon layer to be in contact with the metal word line and the polysilicon layer, and comprising a conduction layer having a different work function from the metal word line.
2. The phase-change memory device of claim 1 , wherein the auxiliary diode layer is disposed on sidewalls of the metal word line and the polysilicon layer to cover side surfaces of an interface between the polysilicon layer and the metal word line.
3. The phase-change memory device of claim 1 , wherein the auxiliary diode layer is disposed between the metal word line and the polysilicon layer.
4. The phase-change memory device of claim 3 , wherein the auxiliary diode layer has a sidewall aligned with a sidewall of the polysilicon layer.
5. The phase-change memory device of claim 1 , wherein the auxiliary diode layer is disposed on a sidewall of the metal word line.
6. The phase-change memory device of claim 5 , wherein the auxiliary diode layer has a sidewall aligned with a sidewall of the polysilicon layer.