Acceleration switch and electronic device
View Patent ↗An acceleration switch has a frame fixed to a first substrate, a beam positioned inside the frame and supported by the frame, and a mass body supported by the beam and having a hole portion at substantially a center thereof. A central body is positioned inside the hole portion and fixed to the first substrate. The hole portion or the central body are suitably configured, or the position of the hole portion or the position of the center body is suitably selected, so that the acceleration switch is capable of detecting a predetermined acceleration irrespective of the influence of gravity acceleration.
1. An acceleration switch, comprising:
a first substrate made of an insulating material;
a frame fixed to the first substrate;
a beam positioned inside the frame and supported by the frame;
a mass body supported by the beam and having a hole portion at substantially a center thereof; and
a central body positioned inside the hole portion and fixed to the first substrate,
wherein a center of the mass body and a center of the central body coincide, and a center of the hole portion does not coincide with the center of the mass body and the center of the central body, when the first substrate is placed substantially horizontal.
2. An acceleration switch according to claim 1 , further comprising a second substrate which is positioned on an opposite side of the first substrate and is made of an insulating material, the frame and the central body being fixed to the second substrate.
3. An acceleration switch according to claim 2 , wherein the second substrate has a first through electrode for electrically connecting the frame and an external circuit to each other, and a second through electrode for electrically connecting the central body and the external circuit to each other.
4. An acceleration switch according to claim 1 , wherein the beam comprises a single beam.
5. An acceleration switch according to claim 1 , wherein the beam has an arc-shape configuration.
6. An acceleration switch according to claim 1 , wherein a distance between a side surface of the hole portion and a side surface of the central body is 1 μm or more and 20 μm or less when the substrate is placed substantially horizontal.
7. An acceleration switch according to claim 1 , wherein the hole portion has two opposed straight portions interconnected at opposite ends by two opposed arc portions.
8. An electronic device, comprising:
the acceleration switch according to claim 1 ; and
a circuit for detecting a detection signal output from the acceleration switch to perform a predetermined operation in accordance with the detection signal.
9. An acceleration switch, comprising:
a first substrate made of an insulating material;
a frame fixed to the first substrate;
a beam positioned inside the frame and supported by the frame;
a mass body supported by the beam and having a hole portion at substantially a center thereof; and
a central body positioned inside the hole portion and fixed to the first substrate,
wherein a center of the mass body and a center of the hole portion coincide, and a center of the central body does not coincide with the center of the mass body and the center of the hole portion, when the first substrate is placed substantially horizontal.
10. An acceleration switch according to claim 9 , further comprising a second substrate which is positioned on an opposite side of the first substrate and is made of an insulating material, the frame and the central body being fixed to the second substrate.
11. An acceleration switch according to claim 10 , wherein the second substrate has a first through electrode for electrically connecting the frame and an external circuit to each other, and a second through electrode for electrically connecting the central body and the external circuit to each other.
12. An acceleration switch according to claim 9 , wherein the beam comprises a single beam.
13. An acceleration switch according to claim 9 , wherein the beam has an arc-shape configuration.
14. An acceleration switch according to claim 9 , wherein a distance between a side surface of the hole portion and a side surface of the central body is 1 μm or more and 20 μm or less when the substrate is placed substantially horizontal.
15. An acceleration switch according to claim 9 , wherein the hole portion has two opposed straight portions interconnected at opposite ends by two opposed arc portions.
16. An electronic device, comprising:
the acceleration switch according to claim 9 ; and
a circuit for detecting a detection signal output from the acceleration switch to perform a predetermined operation in accordance with the detection signal.
17. An acceleration switch, comprising:
a first substrate made of an insulating material;
a frame fixed to the first substrate;
a beam positioned inside the frame and supported by the frame;
a mass body supported by the beam and having a hole portion at substantially a center thereof; and
a central body positioned inside the hole portion and fixed to the first substrate,
wherein a center of the central body and a center of the hole portion coincide when a predetermined acceleration other than gravity acceleration is applied to the acceleration switch.
18. An acceleration switch according to claim 17 , wherein a distance between a side surface of the hole portion and a side surface of the central body is 1 μm or more and 20 μm or less when the substrate is placed substantially horizontal.
19. An acceleration switch according to claim 17 , wherein the hole portion has two opposed straight portions interconnected at opposite ends by two opposed arc portions.
20. An electronic device, comprising:
the acceleration switch according to claim 17 ; and
a circuit for detecting a detection signal output from the acceleration switch to perform a predetermined operation in accordance with the detection signal.